JPS5413268A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5413268A
JPS5413268A JP7776677A JP7776677A JPS5413268A JP S5413268 A JPS5413268 A JP S5413268A JP 7776677 A JP7776677 A JP 7776677A JP 7776677 A JP7776677 A JP 7776677A JP S5413268 A JPS5413268 A JP S5413268A
Authority
JP
Japan
Prior art keywords
perforated
manufacture
semiconductor device
oxidized
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7776677A
Other languages
Japanese (ja)
Inventor
Norio Totsuka
Taichi Usui
Susumu Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7776677A priority Critical patent/JPS5413268A/en
Publication of JPS5413268A publication Critical patent/JPS5413268A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To stabilize the high dielectric strength element alnd to avoid the deterioration of performance due to effect by external atomosphere, by performing oxidizing processing for perforated Si layer into oxidized perforated Si and by taking the Si oxide film and the oxidized perforated Si as the protection film of semiconductor.
COPYRIGHT: (C)1979,JPO&Japio
JP7776677A 1977-07-01 1977-07-01 Manufacture for semiconductor device Pending JPS5413268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7776677A JPS5413268A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7776677A JPS5413268A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5413268A true JPS5413268A (en) 1979-01-31

Family

ID=13643054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7776677A Pending JPS5413268A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5413268A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262186A (en) * 1991-12-04 1993-06-09 Philips Electronic Associated A capacitive structure for a semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262186A (en) * 1991-12-04 1993-06-09 Philips Electronic Associated A capacitive structure for a semiconductor device

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