JPS5413268A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5413268A JPS5413268A JP7776677A JP7776677A JPS5413268A JP S5413268 A JPS5413268 A JP S5413268A JP 7776677 A JP7776677 A JP 7776677A JP 7776677 A JP7776677 A JP 7776677A JP S5413268 A JPS5413268 A JP S5413268A
- Authority
- JP
- Japan
- Prior art keywords
- perforated
- manufacture
- semiconductor device
- oxidized
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To stabilize the high dielectric strength element alnd to avoid the deterioration of performance due to effect by external atomosphere, by performing oxidizing processing for perforated Si layer into oxidized perforated Si and by taking the Si oxide film and the oxidized perforated Si as the protection film of semiconductor.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7776677A JPS5413268A (en) | 1977-07-01 | 1977-07-01 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7776677A JPS5413268A (en) | 1977-07-01 | 1977-07-01 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5413268A true JPS5413268A (en) | 1979-01-31 |
Family
ID=13643054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7776677A Pending JPS5413268A (en) | 1977-07-01 | 1977-07-01 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5413268A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2262186A (en) * | 1991-12-04 | 1993-06-09 | Philips Electronic Associated | A capacitive structure for a semiconductor device |
-
1977
- 1977-07-01 JP JP7776677A patent/JPS5413268A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2262186A (en) * | 1991-12-04 | 1993-06-09 | Philips Electronic Associated | A capacitive structure for a semiconductor device |
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