JPS54128878A - Adsorber - Google Patents
AdsorberInfo
- Publication number
- JPS54128878A JPS54128878A JP3633478A JP3633478A JPS54128878A JP S54128878 A JPS54128878 A JP S54128878A JP 3633478 A JP3633478 A JP 3633478A JP 3633478 A JP3633478 A JP 3633478A JP S54128878 A JPS54128878 A JP S54128878A
- Authority
- JP
- Japan
- Prior art keywords
- adsorbing
- seal
- communicating hole
- mambers
- adsorbed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: For adsorbing and holding a material without causing any deviation thereof, to desirable disconnect the communicating hole communicating with a vscuum source to form adsorbing spaces having a corresponding size to that of said material and a plurality of holes provided in a substrate plate from each other.
CONSTITUTION: A material to be adsorbed 16 is placed on seal members, 11a, 11b, 11c, 11d ... Next, a communicating hole 12 is connected for example to the holes provided on the adsorbing surface of a substrate 9 by means of a hermetic sealing member 15 and disconnected from holes 13c, l3d by turning a handle 14. Next, said communicating hole 12 is connected to a vacuum source, adsorbing spaces 17a, 17b are reduced in pressure, and said material 16 is closely contacted with seal mambers 11a, 11b for holding. At this time, said material 16 can be adsorbed and held flat without causing any deviation there of thanks to a plurality of seal mambers.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3633478A JPS54128878A (en) | 1978-03-29 | 1978-03-29 | Adsorber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3633478A JPS54128878A (en) | 1978-03-29 | 1978-03-29 | Adsorber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54128878A true JPS54128878A (en) | 1979-10-05 |
Family
ID=12466922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3633478A Pending JPS54128878A (en) | 1978-03-29 | 1978-03-29 | Adsorber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54128878A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01117811U (en) * | 1988-02-05 | 1989-08-09 |
-
1978
- 1978-03-29 JP JP3633478A patent/JPS54128878A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01117811U (en) * | 1988-02-05 | 1989-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6457637A (en) | Method and apparatus for handling wafer | |
JPS5274580A (en) | Boat for vacuum evaporation | |
JPS54128878A (en) | Adsorber | |
JPS5339330A (en) | Application of adherends to articles | |
WO1991006369A3 (en) | Temperature-equalization chamber for bringing the contents of a microtitration plate to a uniform temperature | |
CA1030040A (en) | Compensated work port fluid valves | |
JPS51131267A (en) | The exhaustion system of the electronic microscope | |
JPS51135790A (en) | Method of packing articles in a corrugated cardboard case | |
JPS5240276A (en) | Fluid pressure type actuator | |
JPS51121651A (en) | Screw and its manufacturing method | |
JPS54143636A (en) | Printer | |
AU534165B2 (en) | Pressure compensated directional valve | |
JPS5217280A (en) | Low-noise device of rotary plate | |
JPS51121262A (en) | Method of manufacturing semiconductor devices | |
JPS55145360A (en) | Semiconductor device | |
JPS53138167A (en) | Pallet for long materials | |
JPS55107242A (en) | Transposition of thin board | |
JPS5283244A (en) | Preparation of liquid crystal cell | |
JPS57121234A (en) | Plasma processing and device thereof | |
JPS5662232A (en) | Diaphragm mechanism | |
JPS5351591A (en) | Method of removing sharpened portions from the peripheral corners of a plate | |
JPS548271A (en) | Fluidic pressure drive circuit | |
FR2273748A1 (en) | Valveless suction grip - has seals forming series of cells outside perforated plate | |
JPS51132085A (en) | Manufacturing method of semiconductor device | |
JPS54574A (en) | Sealing jig for semiconductor devices |