JPS54128878A - Adsorber - Google Patents

Adsorber

Info

Publication number
JPS54128878A
JPS54128878A JP3633478A JP3633478A JPS54128878A JP S54128878 A JPS54128878 A JP S54128878A JP 3633478 A JP3633478 A JP 3633478A JP 3633478 A JP3633478 A JP 3633478A JP S54128878 A JPS54128878 A JP S54128878A
Authority
JP
Japan
Prior art keywords
adsorbing
seal
communicating hole
mambers
adsorbed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3633478A
Other languages
Japanese (ja)
Inventor
Yoshiro Ishijima
Tadashi Aihara
Toshimichi Haraguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP3633478A priority Critical patent/JPS54128878A/en
Publication of JPS54128878A publication Critical patent/JPS54128878A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: For adsorbing and holding a material without causing any deviation thereof, to desirable disconnect the communicating hole communicating with a vscuum source to form adsorbing spaces having a corresponding size to that of said material and a plurality of holes provided in a substrate plate from each other.
CONSTITUTION: A material to be adsorbed 16 is placed on seal members, 11a, 11b, 11c, 11d ... Next, a communicating hole 12 is connected for example to the holes provided on the adsorbing surface of a substrate 9 by means of a hermetic sealing member 15 and disconnected from holes 13c, l3d by turning a handle 14. Next, said communicating hole 12 is connected to a vacuum source, adsorbing spaces 17a, 17b are reduced in pressure, and said material 16 is closely contacted with seal mambers 11a, 11b for holding. At this time, said material 16 can be adsorbed and held flat without causing any deviation there of thanks to a plurality of seal mambers.
COPYRIGHT: (C)1979,JPO&Japio
JP3633478A 1978-03-29 1978-03-29 Adsorber Pending JPS54128878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633478A JPS54128878A (en) 1978-03-29 1978-03-29 Adsorber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633478A JPS54128878A (en) 1978-03-29 1978-03-29 Adsorber

Publications (1)

Publication Number Publication Date
JPS54128878A true JPS54128878A (en) 1979-10-05

Family

ID=12466922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633478A Pending JPS54128878A (en) 1978-03-29 1978-03-29 Adsorber

Country Status (1)

Country Link
JP (1) JPS54128878A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01117811U (en) * 1988-02-05 1989-08-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01117811U (en) * 1988-02-05 1989-08-09

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