JPS54119375A - Pulling-up apparatus for silicon single crystal - Google Patents
Pulling-up apparatus for silicon single crystalInfo
- Publication number
- JPS54119375A JPS54119375A JP2656778A JP2656778A JPS54119375A JP S54119375 A JPS54119375 A JP S54119375A JP 2656778 A JP2656778 A JP 2656778A JP 2656778 A JP2656778 A JP 2656778A JP S54119375 A JPS54119375 A JP S54119375A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- single crystal
- pulling
- gas
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To provide a pulling-up apparatus producing excellent Si single crystal of very low carbon content, by installing, above a crucible contg. Si polycrystal, a gas-purging pipe which makes it possible to charge inert gas upon occasion, with its inner diameter and the distance from its lower end to the upper end of the crucible specified.
CONSTITUTION: The ratio of the diameter A of a gas-purging pipe 15 at the lower end to the diameter C of a crucible 5 is set at A/C≥0.5, and the distance B from the upper end of the crucibles 5, 6 to the lower end of the pipe 15 at B≤110 mm. During melting step of Si polycrystal 4, gas purge is conducted with inert gas such as Ar etc. through the pipe 15 so as to prepare Si single crystal which is pulled up. Consequently the pulled-up Si single crystal has very low carbon contamination. The pipe 15 never disturbs easiness of pulling-up operation for Si single crystal, and recharging operation for raw material because it is arranged at such a position that the pipe 15 never interferes with the operation using the inspection holes 8.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2656778A JPS54119375A (en) | 1978-03-10 | 1978-03-10 | Pulling-up apparatus for silicon single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2656778A JPS54119375A (en) | 1978-03-10 | 1978-03-10 | Pulling-up apparatus for silicon single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54119375A true JPS54119375A (en) | 1979-09-17 |
Family
ID=12197110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2656778A Pending JPS54119375A (en) | 1978-03-10 | 1978-03-10 | Pulling-up apparatus for silicon single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54119375A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0661715U (en) * | 1993-02-05 | 1994-08-30 | 本州製紙株式会社 | Carton with outlet |
-
1978
- 1978-03-10 JP JP2656778A patent/JPS54119375A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0661715U (en) * | 1993-02-05 | 1994-08-30 | 本州製紙株式会社 | Carton with outlet |
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