JPS54118771A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54118771A
JPS54118771A JP2539278A JP2539278A JPS54118771A JP S54118771 A JPS54118771 A JP S54118771A JP 2539278 A JP2539278 A JP 2539278A JP 2539278 A JP2539278 A JP 2539278A JP S54118771 A JPS54118771 A JP S54118771A
Authority
JP
Japan
Prior art keywords
temperatures
gold
oxide film
electron beam
voltage drop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2539278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123649B2 (cg-RX-API-DMAC7.html
Inventor
Mitsuru Hirao
Toshikatsu Shirasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2539278A priority Critical patent/JPS54118771A/ja
Publication of JPS54118771A publication Critical patent/JPS54118771A/ja
Publication of JPS6123649B2 publication Critical patent/JPS6123649B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
JP2539278A 1978-03-08 1978-03-08 Manufacture of semiconductor device Granted JPS54118771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2539278A JPS54118771A (en) 1978-03-08 1978-03-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2539278A JPS54118771A (en) 1978-03-08 1978-03-08 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54118771A true JPS54118771A (en) 1979-09-14
JPS6123649B2 JPS6123649B2 (cg-RX-API-DMAC7.html) 1986-06-06

Family

ID=12164604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2539278A Granted JPS54118771A (en) 1978-03-08 1978-03-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54118771A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141444U (cg-RX-API-DMAC7.html) * 1980-03-24 1981-10-26

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141583A (en) * 1976-05-03 1977-11-25 Gen Electric Method of producing semiconductor device
JPS53145583A (en) * 1977-05-25 1978-12-18 Nec Corp Semiconductor device and production of the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141583A (en) * 1976-05-03 1977-11-25 Gen Electric Method of producing semiconductor device
JPS53145583A (en) * 1977-05-25 1978-12-18 Nec Corp Semiconductor device and production of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141444U (cg-RX-API-DMAC7.html) * 1980-03-24 1981-10-26

Also Published As

Publication number Publication date
JPS6123649B2 (cg-RX-API-DMAC7.html) 1986-06-06

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