JPS54118168A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54118168A JPS54118168A JP2581578A JP2581578A JPS54118168A JP S54118168 A JPS54118168 A JP S54118168A JP 2581578 A JP2581578 A JP 2581578A JP 2581578 A JP2581578 A JP 2581578A JP S54118168 A JPS54118168 A JP S54118168A
- Authority
- JP
- Japan
- Prior art keywords
- scribe line
- platinum
- coating
- manufacture
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To avoid formation of the platinum silicate on the scribe line by coating previously over the scribe line on the Si substrate with the photosensitive resin and then coating the platinum.
CONSTITUTION: Photosensitive resin 9 is formed selectively near the scribe line, and film 9 is lifted off after coating of platinum film 8. With this method, no platinum silicate layer is caused on the scribe line in the subsequent heat treatment.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2581578A JPS54118168A (en) | 1978-03-06 | 1978-03-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2581578A JPS54118168A (en) | 1978-03-06 | 1978-03-06 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54118168A true JPS54118168A (en) | 1979-09-13 |
Family
ID=12176353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2581578A Pending JPS54118168A (en) | 1978-03-06 | 1978-03-06 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54118168A (en) |
-
1978
- 1978-03-06 JP JP2581578A patent/JPS54118168A/en active Pending
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