JPS54109784A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54109784A
JPS54109784A JP1715378A JP1715378A JPS54109784A JP S54109784 A JPS54109784 A JP S54109784A JP 1715378 A JP1715378 A JP 1715378A JP 1715378 A JP1715378 A JP 1715378A JP S54109784 A JPS54109784 A JP S54109784A
Authority
JP
Japan
Prior art keywords
electrode
oxide film
matching
self
selectively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1715378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243550B2 (enExample
Inventor
Masanori Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1715378A priority Critical patent/JPS54109784A/ja
Priority to DE2847305A priority patent/DE2847305C2/de
Publication of JPS54109784A publication Critical patent/JPS54109784A/ja
Publication of JPS6243550B2 publication Critical patent/JPS6243550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP1715378A 1977-10-31 1978-02-16 Manufacture of semiconductor device Granted JPS54109784A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1715378A JPS54109784A (en) 1978-02-16 1978-02-16 Manufacture of semiconductor device
DE2847305A DE2847305C2 (de) 1977-10-31 1978-10-31 Verfahren zur Herstellung einer Halbleiterspeichervorrichtung mit schwebender Gateelektrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1715378A JPS54109784A (en) 1978-02-16 1978-02-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54109784A true JPS54109784A (en) 1979-08-28
JPS6243550B2 JPS6243550B2 (enExample) 1987-09-14

Family

ID=11936028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1715378A Granted JPS54109784A (en) 1977-10-31 1978-02-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54109784A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100546201B1 (ko) * 1999-06-30 2006-01-24 주식회사 하이닉스반도체 스택 게이트 플래쉬 이이피롬 셀의 제조 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051276A (enExample) * 1973-08-06 1975-05-08
JPS5075775A (enExample) * 1973-11-06 1975-06-21
JPS51150284A (en) * 1975-06-18 1976-12-23 Hitachi Ltd Semiconductor unvolatile memory unit
JPS53124084A (en) * 1977-04-06 1978-10-30 Hitachi Ltd Semiconductor memory device containing floating type poly silicon layer and its manufacture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051276A (enExample) * 1973-08-06 1975-05-08
JPS5075775A (enExample) * 1973-11-06 1975-06-21
JPS51150284A (en) * 1975-06-18 1976-12-23 Hitachi Ltd Semiconductor unvolatile memory unit
JPS53124084A (en) * 1977-04-06 1978-10-30 Hitachi Ltd Semiconductor memory device containing floating type poly silicon layer and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100546201B1 (ko) * 1999-06-30 2006-01-24 주식회사 하이닉스반도체 스택 게이트 플래쉬 이이피롬 셀의 제조 방법

Also Published As

Publication number Publication date
JPS6243550B2 (enExample) 1987-09-14

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