JPS54106180A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS54106180A
JPS54106180A JP1314678A JP1314678A JPS54106180A JP S54106180 A JPS54106180 A JP S54106180A JP 1314678 A JP1314678 A JP 1314678A JP 1314678 A JP1314678 A JP 1314678A JP S54106180 A JPS54106180 A JP S54106180A
Authority
JP
Japan
Prior art keywords
substrate
impurity density
heat treatment
atom
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1314678A
Other languages
English (en)
Other versions
JPS5626982B2 (ja
Inventor
Michiyuki Harada
Masayasu Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1314678A priority Critical patent/JPS54106180A/ja
Publication of JPS54106180A publication Critical patent/JPS54106180A/ja
Publication of JPS5626982B2 publication Critical patent/JPS5626982B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP1314678A 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit Granted JPS54106180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1314678A JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1314678A JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS54106180A true JPS54106180A (en) 1979-08-20
JPS5626982B2 JPS5626982B2 (ja) 1981-06-22

Family

ID=11825013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1314678A Granted JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS54106180A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100477A (en) * 1980-01-16 1981-08-12 Toshiba Corp Semiconductor device
US4502205A (en) * 1982-06-23 1985-03-05 Fujitsu Limited Method of manufacturing an MIS type semiconductor device
JPH0397224A (ja) * 1989-09-11 1991-04-23 Toshiba Corp 半導体装置の製造方法
US5338697A (en) * 1989-12-01 1994-08-16 Seiko Instruments Inc. Doping method of barrier region in semiconductor device
US5532185A (en) * 1991-03-27 1996-07-02 Seiko Instruments Inc. Impurity doping method with adsorbed diffusion source
EP0722181A1 (en) * 1993-08-20 1996-07-17 OHMI, Tadahiro Ionen implantierungsgerät

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100477A (en) * 1980-01-16 1981-08-12 Toshiba Corp Semiconductor device
US4502205A (en) * 1982-06-23 1985-03-05 Fujitsu Limited Method of manufacturing an MIS type semiconductor device
JPH0397224A (ja) * 1989-09-11 1991-04-23 Toshiba Corp 半導体装置の製造方法
US5338697A (en) * 1989-12-01 1994-08-16 Seiko Instruments Inc. Doping method of barrier region in semiconductor device
US5532185A (en) * 1991-03-27 1996-07-02 Seiko Instruments Inc. Impurity doping method with adsorbed diffusion source
EP0722181A1 (en) * 1993-08-20 1996-07-17 OHMI, Tadahiro Ionen implantierungsgerät
EP0722181A4 (en) * 1993-08-20 1997-01-08 Tadahiro Ohmi ION IMPLANTER

Also Published As

Publication number Publication date
JPS5626982B2 (ja) 1981-06-22

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