JPS54105967A - Defect test system for pattern featuring directivity - Google Patents

Defect test system for pattern featuring directivity

Info

Publication number
JPS54105967A
JPS54105967A JP1236678A JP1236678A JPS54105967A JP S54105967 A JPS54105967 A JP S54105967A JP 1236678 A JP1236678 A JP 1236678A JP 1236678 A JP1236678 A JP 1236678A JP S54105967 A JPS54105967 A JP S54105967A
Authority
JP
Japan
Prior art keywords
pattern
defect
directivity
obtaining
optical lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1236678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5616542B2 (enExample
Inventor
Masakata Minami
Kazuaki Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1236678A priority Critical patent/JPS54105967A/ja
Publication of JPS54105967A publication Critical patent/JPS54105967A/ja
Publication of JPS5616542B2 publication Critical patent/JPS5616542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1236678A 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity Granted JPS54105967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1236678A JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1236678A JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Publications (2)

Publication Number Publication Date
JPS54105967A true JPS54105967A (en) 1979-08-20
JPS5616542B2 JPS5616542B2 (enExample) 1981-04-16

Family

ID=11803262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1236678A Granted JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Country Status (1)

Country Link
JP (1) JPS54105967A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117106A (en) * 1980-02-20 1981-09-14 Dainippon Printing Co Ltd Inspecting device for pattern defect
JPS572522A (en) * 1980-06-05 1982-01-07 Dainippon Printing Co Ltd Defect inspecting device for regular pattern
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
FR2706048A1 (fr) * 1993-06-04 1994-12-09 Marelli Autronica Collimateur facilement contrôlable.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682102B2 (ja) * 1987-02-27 1994-10-19 三菱電機株式会社 パターン欠陥検査装置及びパターン欠陥検査方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117106A (en) * 1980-02-20 1981-09-14 Dainippon Printing Co Ltd Inspecting device for pattern defect
JPS572522A (en) * 1980-06-05 1982-01-07 Dainippon Printing Co Ltd Defect inspecting device for regular pattern
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
FR2706048A1 (fr) * 1993-06-04 1994-12-09 Marelli Autronica Collimateur facilement contrôlable.

Also Published As

Publication number Publication date
JPS5616542B2 (enExample) 1981-04-16

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