JPS54103367A - Thermal expansion correcting method of probe - Google Patents

Thermal expansion correcting method of probe

Info

Publication number
JPS54103367A
JPS54103367A JP932878A JP932878A JPS54103367A JP S54103367 A JPS54103367 A JP S54103367A JP 932878 A JP932878 A JP 932878A JP 932878 A JP932878 A JP 932878A JP S54103367 A JPS54103367 A JP S54103367A
Authority
JP
Japan
Prior art keywords
probe
temperature
thermal expansion
displacements
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP932878A
Other languages
English (en)
Inventor
Kiyoshi Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP932878A priority Critical patent/JPS54103367A/ja
Publication of JPS54103367A publication Critical patent/JPS54103367A/ja
Pending legal-status Critical Current

Links

JP932878A 1978-02-01 1978-02-01 Thermal expansion correcting method of probe Pending JPS54103367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP932878A JPS54103367A (en) 1978-02-01 1978-02-01 Thermal expansion correcting method of probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP932878A JPS54103367A (en) 1978-02-01 1978-02-01 Thermal expansion correcting method of probe

Publications (1)

Publication Number Publication Date
JPS54103367A true JPS54103367A (en) 1979-08-14

Family

ID=11717394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP932878A Pending JPS54103367A (en) 1978-02-01 1978-02-01 Thermal expansion correcting method of probe

Country Status (1)

Country Link
JP (1) JPS54103367A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4997287A (en) * 1988-07-09 1991-03-05 Lab Products, Inc. Method and apparatus for detecting the temperature of an object on a coordinate measuring apparatus
US5014444A (en) * 1988-11-05 1991-05-14 Carl-Zeiss-Stiftung Probing device for a coordinate measuring apparatus
US5195826A (en) * 1990-12-10 1993-03-23 Carl-Zeiss-Stiftung Method for rapidly measuring the temperature of a workpiece on a coordinate measuring apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4997287A (en) * 1988-07-09 1991-03-05 Lab Products, Inc. Method and apparatus for detecting the temperature of an object on a coordinate measuring apparatus
US5011297A (en) * 1988-07-09 1991-04-30 Carl-Zeiss-Stiftung Apparatus for detecting the temperature of an object on a coordinate measuring apparatus
US5014444A (en) * 1988-11-05 1991-05-14 Carl-Zeiss-Stiftung Probing device for a coordinate measuring apparatus
US5195826A (en) * 1990-12-10 1993-03-23 Carl-Zeiss-Stiftung Method for rapidly measuring the temperature of a workpiece on a coordinate measuring apparatus

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