JPS54103367A - Thermal expansion correcting method of probe - Google Patents
Thermal expansion correcting method of probeInfo
- Publication number
- JPS54103367A JPS54103367A JP932878A JP932878A JPS54103367A JP S54103367 A JPS54103367 A JP S54103367A JP 932878 A JP932878 A JP 932878A JP 932878 A JP932878 A JP 932878A JP S54103367 A JPS54103367 A JP S54103367A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- temperature
- thermal expansion
- displacements
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP932878A JPS54103367A (en) | 1978-02-01 | 1978-02-01 | Thermal expansion correcting method of probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP932878A JPS54103367A (en) | 1978-02-01 | 1978-02-01 | Thermal expansion correcting method of probe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54103367A true JPS54103367A (en) | 1979-08-14 |
Family
ID=11717394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP932878A Pending JPS54103367A (en) | 1978-02-01 | 1978-02-01 | Thermal expansion correcting method of probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54103367A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4997287A (en) * | 1988-07-09 | 1991-03-05 | Lab Products, Inc. | Method and apparatus for detecting the temperature of an object on a coordinate measuring apparatus |
US5014444A (en) * | 1988-11-05 | 1991-05-14 | Carl-Zeiss-Stiftung | Probing device for a coordinate measuring apparatus |
US5195826A (en) * | 1990-12-10 | 1993-03-23 | Carl-Zeiss-Stiftung | Method for rapidly measuring the temperature of a workpiece on a coordinate measuring apparatus |
-
1978
- 1978-02-01 JP JP932878A patent/JPS54103367A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4997287A (en) * | 1988-07-09 | 1991-03-05 | Lab Products, Inc. | Method and apparatus for detecting the temperature of an object on a coordinate measuring apparatus |
US5011297A (en) * | 1988-07-09 | 1991-04-30 | Carl-Zeiss-Stiftung | Apparatus for detecting the temperature of an object on a coordinate measuring apparatus |
US5014444A (en) * | 1988-11-05 | 1991-05-14 | Carl-Zeiss-Stiftung | Probing device for a coordinate measuring apparatus |
US5195826A (en) * | 1990-12-10 | 1993-03-23 | Carl-Zeiss-Stiftung | Method for rapidly measuring the temperature of a workpiece on a coordinate measuring apparatus |
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