JPS54100661A - Focusing unit of electron-beam device - Google Patents
Focusing unit of electron-beam deviceInfo
- Publication number
- JPS54100661A JPS54100661A JP691178A JP691178A JPS54100661A JP S54100661 A JPS54100661 A JP S54100661A JP 691178 A JP691178 A JP 691178A JP 691178 A JP691178 A JP 691178A JP S54100661 A JPS54100661 A JP S54100661A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- smallest
- scan
- signal
- focusing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53006911A JPS5848989B2 (ja) | 1978-01-25 | 1978-01-25 | 電子線装置における焦点合わせ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53006911A JPS5848989B2 (ja) | 1978-01-25 | 1978-01-25 | 電子線装置における焦点合わせ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54100661A true JPS54100661A (en) | 1979-08-08 |
JPS5848989B2 JPS5848989B2 (ja) | 1983-11-01 |
Family
ID=11651414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53006911A Expired JPS5848989B2 (ja) | 1978-01-25 | 1978-01-25 | 電子線装置における焦点合わせ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5848989B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5942750A (ja) * | 1982-08-31 | 1984-03-09 | Shimadzu Corp | 荷電粒子ビ−ム走査型顕微鏡の焦点検出装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834477A (ja) * | 1971-09-06 | 1973-05-18 | ||
JPS50141266A (ja) * | 1974-04-24 | 1975-11-13 |
-
1978
- 1978-01-25 JP JP53006911A patent/JPS5848989B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834477A (ja) * | 1971-09-06 | 1973-05-18 | ||
JPS50141266A (ja) * | 1974-04-24 | 1975-11-13 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5942750A (ja) * | 1982-08-31 | 1984-03-09 | Shimadzu Corp | 荷電粒子ビ−ム走査型顕微鏡の焦点検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5848989B2 (ja) | 1983-11-01 |
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