JPS5394183A - Pattern formation method by lift-off - Google Patents

Pattern formation method by lift-off

Info

Publication number
JPS5394183A
JPS5394183A JP900177A JP900177A JPS5394183A JP S5394183 A JPS5394183 A JP S5394183A JP 900177 A JP900177 A JP 900177A JP 900177 A JP900177 A JP 900177A JP S5394183 A JPS5394183 A JP S5394183A
Authority
JP
Japan
Prior art keywords
lift
formation method
pattern formation
resist
positive type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP900177A
Other languages
Japanese (ja)
Inventor
Sumio Yamamoto
Koichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP900177A priority Critical patent/JPS5394183A/en
Publication of JPS5394183A publication Critical patent/JPS5394183A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To facilitate melting of unnecessary resist after patterning positive type resist.
COPYRIGHT: (C)1978,JPO&Japio
JP900177A 1977-01-28 1977-01-28 Pattern formation method by lift-off Pending JPS5394183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP900177A JPS5394183A (en) 1977-01-28 1977-01-28 Pattern formation method by lift-off

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP900177A JPS5394183A (en) 1977-01-28 1977-01-28 Pattern formation method by lift-off

Publications (1)

Publication Number Publication Date
JPS5394183A true JPS5394183A (en) 1978-08-17

Family

ID=11708424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP900177A Pending JPS5394183A (en) 1977-01-28 1977-01-28 Pattern formation method by lift-off

Country Status (1)

Country Link
JP (1) JPS5394183A (en)

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