JPS5378169A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5378169A
JPS5378169A JP15470076A JP15470076A JPS5378169A JP S5378169 A JPS5378169 A JP S5378169A JP 15470076 A JP15470076 A JP 15470076A JP 15470076 A JP15470076 A JP 15470076A JP S5378169 A JPS5378169 A JP S5378169A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
selectively formed
groove
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15470076A
Other languages
Japanese (ja)
Other versions
JPS5626141B2 (en
Inventor
Takashi Nao
Kazutoshi Nagasawa
Takayuki Nakayama
Juichi Osuzu
Ryosuke Namazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15470076A priority Critical patent/JPS5378169A/en
Publication of JPS5378169A publication Critical patent/JPS5378169A/en
Publication of JPS5626141B2 publication Critical patent/JPS5626141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: On the bottom of a mesa groove, an insulating film such as SiO2, etc., is selectively formed and to a PSG film covering this, a carved groove window is selectively formed; and the complete scribing is done easily, thereby improving its yield.
COPYRIGHT: (C)1978,JPO&Japio
JP15470076A 1976-12-22 1976-12-22 Manufacture of semiconductor device Granted JPS5378169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15470076A JPS5378169A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15470076A JPS5378169A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5378169A true JPS5378169A (en) 1978-07-11
JPS5626141B2 JPS5626141B2 (en) 1981-06-17

Family

ID=15590024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15470076A Granted JPS5378169A (en) 1976-12-22 1976-12-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5378169A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140346642A1 (en) * 2011-09-06 2014-11-27 Vishay Semiconductor Gmbh Surface mountable electronic component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140346642A1 (en) * 2011-09-06 2014-11-27 Vishay Semiconductor Gmbh Surface mountable electronic component
US10629485B2 (en) * 2011-09-06 2020-04-21 Vishay Semiconductor Gmbh Surface mountable electronic component

Also Published As

Publication number Publication date
JPS5626141B2 (en) 1981-06-17

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