JPS5376980A - Gas phase growth method of compound semiconductor - Google Patents

Gas phase growth method of compound semiconductor

Info

Publication number
JPS5376980A
JPS5376980A JP15290876A JP15290876A JPS5376980A JP S5376980 A JPS5376980 A JP S5376980A JP 15290876 A JP15290876 A JP 15290876A JP 15290876 A JP15290876 A JP 15290876A JP S5376980 A JPS5376980 A JP S5376980A
Authority
JP
Japan
Prior art keywords
gas phase
compound semiconductor
growth method
phase growth
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15290876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS544916B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Junji Komeno
Tanji Okawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15290876A priority Critical patent/JPS5376980A/ja
Publication of JPS5376980A publication Critical patent/JPS5376980A/ja
Publication of JPS544916B2 publication Critical patent/JPS544916B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15290876A 1976-12-21 1976-12-21 Gas phase growth method of compound semiconductor Granted JPS5376980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15290876A JPS5376980A (en) 1976-12-21 1976-12-21 Gas phase growth method of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15290876A JPS5376980A (en) 1976-12-21 1976-12-21 Gas phase growth method of compound semiconductor

Publications (2)

Publication Number Publication Date
JPS5376980A true JPS5376980A (en) 1978-07-07
JPS544916B2 JPS544916B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-12

Family

ID=15550759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15290876A Granted JPS5376980A (en) 1976-12-21 1976-12-21 Gas phase growth method of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS5376980A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148915A (en) * 1979-05-10 1980-11-19 Yamaha Motor Co Ltd Exhaust pipe for motorcycle

Also Published As

Publication number Publication date
JPS544916B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-12

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