JPS5375772A - Forming method of positioning mark - Google Patents
Forming method of positioning markInfo
- Publication number
- JPS5375772A JPS5375772A JP15161776A JP15161776A JPS5375772A JP S5375772 A JPS5375772 A JP S5375772A JP 15161776 A JP15161776 A JP 15161776A JP 15161776 A JP15161776 A JP 15161776A JP S5375772 A JPS5375772 A JP S5375772A
- Authority
- JP
- Japan
- Prior art keywords
- positioning mark
- forming method
- thin film
- hole
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15161776A JPS5375772A (en) | 1976-12-16 | 1976-12-16 | Forming method of positioning mark |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15161776A JPS5375772A (en) | 1976-12-16 | 1976-12-16 | Forming method of positioning mark |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5375772A true JPS5375772A (en) | 1978-07-05 |
JPS5412390B2 JPS5412390B2 (ja) | 1979-05-22 |
Family
ID=15522445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15161776A Granted JPS5375772A (en) | 1976-12-16 | 1976-12-16 | Forming method of positioning mark |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5375772A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399770A (en) * | 1977-02-10 | 1978-08-31 | Hitachi Ltd | Soft x-ray transfer mask |
-
1976
- 1976-12-16 JP JP15161776A patent/JPS5375772A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399770A (en) * | 1977-02-10 | 1978-08-31 | Hitachi Ltd | Soft x-ray transfer mask |
Also Published As
Publication number | Publication date |
---|---|
JPS5412390B2 (ja) | 1979-05-22 |
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