JPS5373079A - Wafer reffernge method on projective exposure - Google Patents
Wafer reffernge method on projective exposureInfo
- Publication number
- JPS5373079A JPS5373079A JP14963376A JP14963376A JPS5373079A JP S5373079 A JPS5373079 A JP S5373079A JP 14963376 A JP14963376 A JP 14963376A JP 14963376 A JP14963376 A JP 14963376A JP S5373079 A JPS5373079 A JP S5373079A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reffernge
- exposure
- projective
- fallen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14963376A JPS5373079A (en) | 1976-12-13 | 1976-12-13 | Wafer reffernge method on projective exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14963376A JPS5373079A (en) | 1976-12-13 | 1976-12-13 | Wafer reffernge method on projective exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5373079A true JPS5373079A (en) | 1978-06-29 |
JPS563661B2 JPS563661B2 (US07534539-20090519-C00280.png) | 1981-01-26 |
Family
ID=15479481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14963376A Granted JPS5373079A (en) | 1976-12-13 | 1976-12-13 | Wafer reffernge method on projective exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5373079A (US07534539-20090519-C00280.png) |
-
1976
- 1976-12-13 JP JP14963376A patent/JPS5373079A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS563661B2 (US07534539-20090519-C00280.png) | 1981-01-26 |
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