JPS5373079A - Wafer reffernge method on projective exposure - Google Patents

Wafer reffernge method on projective exposure

Info

Publication number
JPS5373079A
JPS5373079A JP14963376A JP14963376A JPS5373079A JP S5373079 A JPS5373079 A JP S5373079A JP 14963376 A JP14963376 A JP 14963376A JP 14963376 A JP14963376 A JP 14963376A JP S5373079 A JPS5373079 A JP S5373079A
Authority
JP
Japan
Prior art keywords
wafer
reffernge
exposure
projective
fallen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14963376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS563661B2 (US07534539-20090519-C00280.png
Inventor
Koji Igarashi
Niwaji Majima
Naotake Orihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14963376A priority Critical patent/JPS5373079A/ja
Publication of JPS5373079A publication Critical patent/JPS5373079A/ja
Publication of JPS563661B2 publication Critical patent/JPS563661B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14963376A 1976-12-13 1976-12-13 Wafer reffernge method on projective exposure Granted JPS5373079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14963376A JPS5373079A (en) 1976-12-13 1976-12-13 Wafer reffernge method on projective exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14963376A JPS5373079A (en) 1976-12-13 1976-12-13 Wafer reffernge method on projective exposure

Publications (2)

Publication Number Publication Date
JPS5373079A true JPS5373079A (en) 1978-06-29
JPS563661B2 JPS563661B2 (US07534539-20090519-C00280.png) 1981-01-26

Family

ID=15479481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14963376A Granted JPS5373079A (en) 1976-12-13 1976-12-13 Wafer reffernge method on projective exposure

Country Status (1)

Country Link
JP (1) JPS5373079A (US07534539-20090519-C00280.png)

Also Published As

Publication number Publication date
JPS563661B2 (US07534539-20090519-C00280.png) 1981-01-26

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