JPS537171A - Vapor phase growth apparatus - Google Patents
Vapor phase growth apparatusInfo
- Publication number
- JPS537171A JPS537171A JP8214576A JP8214576A JPS537171A JP S537171 A JPS537171 A JP S537171A JP 8214576 A JP8214576 A JP 8214576A JP 8214576 A JP8214576 A JP 8214576A JP S537171 A JPS537171 A JP S537171A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- making
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45585—Compression of gas before it reaches the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To obtain an epitaxial growth layer of a uniform thickness by making the sectional area of the passage for vapor phase growing gas in a reaction tube smaller thereby making the velocity of flow higher as it approcahes to the down flow side of the gas flow.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8214576A JPS537171A (en) | 1976-07-09 | 1976-07-09 | Vapor phase growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8214576A JPS537171A (en) | 1976-07-09 | 1976-07-09 | Vapor phase growth apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS537171A true JPS537171A (en) | 1978-01-23 |
Family
ID=13766254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8214576A Pending JPS537171A (en) | 1976-07-09 | 1976-07-09 | Vapor phase growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS537171A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0229633A2 (en) * | 1986-01-08 | 1987-07-22 | Gregory A. Roche | Apparatus and method for laser-induced chemical vapor deposition |
JP2010138041A (en) * | 2008-12-12 | 2010-06-24 | Sumitomo Electric Ind Ltd | Film formation apparatus |
-
1976
- 1976-07-09 JP JP8214576A patent/JPS537171A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0229633A2 (en) * | 1986-01-08 | 1987-07-22 | Gregory A. Roche | Apparatus and method for laser-induced chemical vapor deposition |
EP0229633A3 (en) * | 1986-01-08 | 1988-09-14 | Gregory A. Roche | Apparatus and method for laser-induced chemical vapor deposition |
JP2010138041A (en) * | 2008-12-12 | 2010-06-24 | Sumitomo Electric Ind Ltd | Film formation apparatus |
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