JPS5368166A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5368166A
JPS5368166A JP14430476A JP14430476A JPS5368166A JP S5368166 A JPS5368166 A JP S5368166A JP 14430476 A JP14430476 A JP 14430476A JP 14430476 A JP14430476 A JP 14430476A JP S5368166 A JPS5368166 A JP S5368166A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
junctions
crossed
evaluate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14430476A
Other languages
Japanese (ja)
Other versions
JPS5927097B2 (en
Inventor
Hirotake Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14430476A priority Critical patent/JPS5927097B2/en
Publication of JPS5368166A publication Critical patent/JPS5368166A/en
Publication of JPS5927097B2 publication Critical patent/JPS5927097B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To evaluate the formation state of junctions with the monitor structural body in which first and second diffused layers of a required length and width are crossed at its central part.
COPYRIGHT: (C)1978,JPO&Japio
JP14430476A 1976-11-30 1976-11-30 Manufacturing method of semiconductor device Expired JPS5927097B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14430476A JPS5927097B2 (en) 1976-11-30 1976-11-30 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14430476A JPS5927097B2 (en) 1976-11-30 1976-11-30 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5368166A true JPS5368166A (en) 1978-06-17
JPS5927097B2 JPS5927097B2 (en) 1984-07-03

Family

ID=15358949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14430476A Expired JPS5927097B2 (en) 1976-11-30 1976-11-30 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5927097B2 (en)

Also Published As

Publication number Publication date
JPS5927097B2 (en) 1984-07-03

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