JPS5368166A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5368166A JPS5368166A JP14430476A JP14430476A JPS5368166A JP S5368166 A JPS5368166 A JP S5368166A JP 14430476 A JP14430476 A JP 14430476A JP 14430476 A JP14430476 A JP 14430476A JP S5368166 A JPS5368166 A JP S5368166A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- junctions
- crossed
- evaluate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To evaluate the formation state of junctions with the monitor structural body in which first and second diffused layers of a required length and width are crossed at its central part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14430476A JPS5927097B2 (en) | 1976-11-30 | 1976-11-30 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14430476A JPS5927097B2 (en) | 1976-11-30 | 1976-11-30 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5368166A true JPS5368166A (en) | 1978-06-17 |
JPS5927097B2 JPS5927097B2 (en) | 1984-07-03 |
Family
ID=15358949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14430476A Expired JPS5927097B2 (en) | 1976-11-30 | 1976-11-30 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5927097B2 (en) |
-
1976
- 1976-11-30 JP JP14430476A patent/JPS5927097B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5927097B2 (en) | 1984-07-03 |
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