JPS5366179A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5366179A
JPS5366179A JP14120976A JP14120976A JPS5366179A JP S5366179 A JPS5366179 A JP S5366179A JP 14120976 A JP14120976 A JP 14120976A JP 14120976 A JP14120976 A JP 14120976A JP S5366179 A JPS5366179 A JP S5366179A
Authority
JP
Japan
Prior art keywords
semiconductor device
mosfet
etching
covering
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14120976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614199B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Iwai
Toshinobu Yanase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14120976A priority Critical patent/JPS5366179A/ja
Publication of JPS5366179A publication Critical patent/JPS5366179A/ja
Publication of JPS614199B2 publication Critical patent/JPS614199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
JP14120976A 1976-11-26 1976-11-26 Semiconductor device Granted JPS5366179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14120976A JPS5366179A (en) 1976-11-26 1976-11-26 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14120976A JPS5366179A (en) 1976-11-26 1976-11-26 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5366179A true JPS5366179A (en) 1978-06-13
JPS614199B2 JPS614199B2 (enrdf_load_stackoverflow) 1986-02-07

Family

ID=15286667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14120976A Granted JPS5366179A (en) 1976-11-26 1976-11-26 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5366179A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162975A (en) * 1978-06-14 1979-12-25 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS5552262A (en) * 1978-10-12 1980-04-16 Fujitsu Ltd Mos semiconductor device
JPS5764972A (en) * 1980-10-09 1982-04-20 Oki Electric Ind Co Ltd Silicon gate type field-effect semiconductor device and manufacture thereof
JPS57113286A (en) * 1980-12-30 1982-07-14 Seiko Epson Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162975A (en) * 1978-06-14 1979-12-25 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS5552262A (en) * 1978-10-12 1980-04-16 Fujitsu Ltd Mos semiconductor device
JPS5764972A (en) * 1980-10-09 1982-04-20 Oki Electric Ind Co Ltd Silicon gate type field-effect semiconductor device and manufacture thereof
JPS57113286A (en) * 1980-12-30 1982-07-14 Seiko Epson Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS614199B2 (enrdf_load_stackoverflow) 1986-02-07

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