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Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
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Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KKfiledCriticalJeol Ltd
Priority to JP14141476ApriorityCriticalpatent/JPS5365652A/en
Publication of JPS5365652ApublicationCriticalpatent/JPS5365652A/en
PURPOSE: To obtain freely a pure dispersion electron beam image, pure carried luminescence image or a mixture image of them, by driving the electron shielding plate located between the test sample and a semiconductor detector.