JPS5360560A - Injection method of ion to treated substance surface - Google Patents

Injection method of ion to treated substance surface

Info

Publication number
JPS5360560A
JPS5360560A JP13529376A JP13529376A JPS5360560A JP S5360560 A JPS5360560 A JP S5360560A JP 13529376 A JP13529376 A JP 13529376A JP 13529376 A JP13529376 A JP 13529376A JP S5360560 A JPS5360560 A JP S5360560A
Authority
JP
Japan
Prior art keywords
treated substance
ion
injection method
substance surface
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13529376A
Other languages
Japanese (ja)
Inventor
Shoji Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13529376A priority Critical patent/JPS5360560A/en
Publication of JPS5360560A publication Critical patent/JPS5360560A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:An accelerator and a deflecting equipment are controlled to inject ions the surface of a treated substance partially, thereby forming a desired ion-injection pattern on the treated substance surface.
JP13529376A 1976-11-12 1976-11-12 Injection method of ion to treated substance surface Pending JPS5360560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13529376A JPS5360560A (en) 1976-11-12 1976-11-12 Injection method of ion to treated substance surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13529376A JPS5360560A (en) 1976-11-12 1976-11-12 Injection method of ion to treated substance surface

Publications (1)

Publication Number Publication Date
JPS5360560A true JPS5360560A (en) 1978-05-31

Family

ID=15148303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13529376A Pending JPS5360560A (en) 1976-11-12 1976-11-12 Injection method of ion to treated substance surface

Country Status (1)

Country Link
JP (1) JPS5360560A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750759A (en) * 1980-09-10 1982-03-25 Hitachi Ltd Charged particle irradiator
JPH06256943A (en) * 1992-11-04 1994-09-13 Hughes Aircraft Co Method and device for introducing high impedance plasma ion

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750759A (en) * 1980-09-10 1982-03-25 Hitachi Ltd Charged particle irradiator
JPH06256943A (en) * 1992-11-04 1994-09-13 Hughes Aircraft Co Method and device for introducing high impedance plasma ion

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