JPS5350972A - Closed tube for heat treatment of multi-element semiconductor - Google Patents
Closed tube for heat treatment of multi-element semiconductorInfo
- Publication number
- JPS5350972A JPS5350972A JP12595276A JP12595276A JPS5350972A JP S5350972 A JPS5350972 A JP S5350972A JP 12595276 A JP12595276 A JP 12595276A JP 12595276 A JP12595276 A JP 12595276A JP S5350972 A JPS5350972 A JP S5350972A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- element semiconductor
- closed tube
- sources
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To perfect the isolation between wafers and sources and reduce the production of lattice defects by providing a recess to an outer tube in the position away from multi-element semiconductor wafer accommodating part, providing a turn-back part for accommodating sources in the inner tube to be inserted therein and contacting the turn-back part to the recess of the outer tube to form double tubes.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12595276A JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12595276A JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5350972A true JPS5350972A (en) | 1978-05-09 |
JPS5520377B2 JPS5520377B2 (en) | 1980-06-02 |
Family
ID=14923023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12595276A Granted JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5350972A (en) |
-
1976
- 1976-10-20 JP JP12595276A patent/JPS5350972A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5520377B2 (en) | 1980-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5350972A (en) | Closed tube for heat treatment of multi-element semiconductor | |
JPS5318967A (en) | Wafer sucking jig | |
JPS5424571A (en) | Manufacture for semiconductor wafer | |
JPS5373072A (en) | Formation of oxidized film | |
JPS52127179A (en) | Manufacturing method of semiconductor device | |
JPS5242365A (en) | Tool for semiconductors | |
JPS52156552A (en) | Wafer inspection apparatus | |
JPS53142185A (en) | Manufacture of walled emitter type semiconductor device | |
JPS51148369A (en) | Manufacturing method of semiconductor | |
JPS52155968A (en) | Semiconductor wafer and its production | |
JPS52155969A (en) | Reduced pressure heat treatment furnace of semiconductor wafers | |
JPS52149968A (en) | Heat treatment method of semiconductor wafers | |
JPS5248469A (en) | Process for production of semiconductor device | |
JPS52143759A (en) | Impurity diffusion method for semiconductor wafers | |
JPS533061A (en) | Semiconductor heat treatment method and members used for the same | |
JPS5377178A (en) | Chuking device of semiconductor element substrate | |
JPS5478658A (en) | Impurity diffusion method | |
JPS5358782A (en) | Semiconductor device | |
JPS51148389A (en) | Manufacturing method of semiconductor device | |
JPS5326663A (en) | Manu facture of semiconductor device | |
JPS5379461A (en) | Semiconductor device and its manufacturing process | |
JPS5424575A (en) | Handling method of wafer | |
JPS5318976A (en) | Production of semiconductor device | |
JPS5258478A (en) | Wafer jig | |
JPS5211867A (en) | Manufacturing method of a semiconductor device |