JPS5258478A - Wafer jig - Google Patents

Wafer jig

Info

Publication number
JPS5258478A
JPS5258478A JP13406275A JP13406275A JPS5258478A JP S5258478 A JPS5258478 A JP S5258478A JP 13406275 A JP13406275 A JP 13406275A JP 13406275 A JP13406275 A JP 13406275A JP S5258478 A JPS5258478 A JP S5258478A
Authority
JP
Japan
Prior art keywords
wafer jig
reaction tube
horizontal reaction
wafer
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13406275A
Other languages
Japanese (ja)
Inventor
Hideo Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13406275A priority Critical patent/JPS5258478A/en
Publication of JPS5258478A publication Critical patent/JPS5258478A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the disturbance the of reaction gas flow by making the jig body directly connected between holding members in such a shape that it makes arching contact with the inside surface of a horizontal reaction tube and providing protruding arm members that position wafers to a predetermined height, in the wafer jig used in the horizontal reaction tube.
COPYRIGHT: (C)1977,JPO&Japio
JP13406275A 1975-11-10 1975-11-10 Wafer jig Pending JPS5258478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13406275A JPS5258478A (en) 1975-11-10 1975-11-10 Wafer jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13406275A JPS5258478A (en) 1975-11-10 1975-11-10 Wafer jig

Publications (1)

Publication Number Publication Date
JPS5258478A true JPS5258478A (en) 1977-05-13

Family

ID=15119463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13406275A Pending JPS5258478A (en) 1975-11-10 1975-11-10 Wafer jig

Country Status (1)

Country Link
JP (1) JPS5258478A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185838U (en) * 1983-05-26 1984-12-10 日本電気ホームエレクトロニクス株式会社 Semiconductor manufacturing jig

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185838U (en) * 1983-05-26 1984-12-10 日本電気ホームエレクトロニクス株式会社 Semiconductor manufacturing jig

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