JPS5258478A - Wafer jig - Google Patents
Wafer jigInfo
- Publication number
- JPS5258478A JPS5258478A JP13406275A JP13406275A JPS5258478A JP S5258478 A JPS5258478 A JP S5258478A JP 13406275 A JP13406275 A JP 13406275A JP 13406275 A JP13406275 A JP 13406275A JP S5258478 A JPS5258478 A JP S5258478A
- Authority
- JP
- Japan
- Prior art keywords
- wafer jig
- reaction tube
- horizontal reaction
- wafer
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the disturbance the of reaction gas flow by making the jig body directly connected between holding members in such a shape that it makes arching contact with the inside surface of a horizontal reaction tube and providing protruding arm members that position wafers to a predetermined height, in the wafer jig used in the horizontal reaction tube.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13406275A JPS5258478A (en) | 1975-11-10 | 1975-11-10 | Wafer jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13406275A JPS5258478A (en) | 1975-11-10 | 1975-11-10 | Wafer jig |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258478A true JPS5258478A (en) | 1977-05-13 |
Family
ID=15119463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13406275A Pending JPS5258478A (en) | 1975-11-10 | 1975-11-10 | Wafer jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258478A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185838U (en) * | 1983-05-26 | 1984-12-10 | 日本電気ホームエレクトロニクス株式会社 | Semiconductor manufacturing jig |
-
1975
- 1975-11-10 JP JP13406275A patent/JPS5258478A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185838U (en) * | 1983-05-26 | 1984-12-10 | 日本電気ホームエレクトロニクス株式会社 | Semiconductor manufacturing jig |
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