JPS5347763A - Formation of p type layer - Google Patents

Formation of p type layer

Info

Publication number
JPS5347763A
JPS5347763A JP12192276A JP12192276A JPS5347763A JP S5347763 A JPS5347763 A JP S5347763A JP 12192276 A JP12192276 A JP 12192276A JP 12192276 A JP12192276 A JP 12192276A JP S5347763 A JPS5347763 A JP S5347763A
Authority
JP
Japan
Prior art keywords
formation
type layer
film
sio
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12192276A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12192276A priority Critical patent/JPS5347763A/en
Publication of JPS5347763A publication Critical patent/JPS5347763A/en
Pending legal-status Critical Current

Links

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  • Element Separation (AREA)

Abstract

PURPOSE: To make P+ isolating layers through B diffusion by inhibiting the conversion of a SiO2 film to BSG with a poly-Si film and use the SiO2 film as a diffusion mask and protecting film without changing its thickness.
COPYRIGHT: (C)1978,JPO&Japio
JP12192276A 1976-10-13 1976-10-13 Formation of p type layer Pending JPS5347763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12192276A JPS5347763A (en) 1976-10-13 1976-10-13 Formation of p type layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12192276A JPS5347763A (en) 1976-10-13 1976-10-13 Formation of p type layer

Publications (1)

Publication Number Publication Date
JPS5347763A true JPS5347763A (en) 1978-04-28

Family

ID=14823224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12192276A Pending JPS5347763A (en) 1976-10-13 1976-10-13 Formation of p type layer

Country Status (1)

Country Link
JP (1) JPS5347763A (en)

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