JPS5345178A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5345178A JPS5345178A JP12010576A JP12010576A JPS5345178A JP S5345178 A JPS5345178 A JP S5345178A JP 12010576 A JP12010576 A JP 12010576A JP 12010576 A JP12010576 A JP 12010576A JP S5345178 A JPS5345178 A JP S5345178A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- field
- prevent
- bsg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To prevent etching of a field insulation film in later process, prevent the decrease in the threshold voltage of field part and improve the quality and reliability of the device by converting the surface of the field oxide film to BSG.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12010576A JPS5345178A (en) | 1976-10-06 | 1976-10-06 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12010576A JPS5345178A (en) | 1976-10-06 | 1976-10-06 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5345178A true JPS5345178A (en) | 1978-04-22 |
Family
ID=14778040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12010576A Pending JPS5345178A (en) | 1976-10-06 | 1976-10-06 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5345178A (en) |
-
1976
- 1976-10-06 JP JP12010576A patent/JPS5345178A/en active Pending
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