JPS5345178A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5345178A
JPS5345178A JP12010576A JP12010576A JPS5345178A JP S5345178 A JPS5345178 A JP S5345178A JP 12010576 A JP12010576 A JP 12010576A JP 12010576 A JP12010576 A JP 12010576A JP S5345178 A JPS5345178 A JP S5345178A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
field
prevent
bsg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12010576A
Other languages
Japanese (ja)
Inventor
Yoshihiko Higa
Akira Takei
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12010576A priority Critical patent/JPS5345178A/en
Publication of JPS5345178A publication Critical patent/JPS5345178A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To prevent etching of a field insulation film in later process, prevent the decrease in the threshold voltage of field part and improve the quality and reliability of the device by converting the surface of the field oxide film to BSG.
COPYRIGHT: (C)1978,JPO&Japio
JP12010576A 1976-10-06 1976-10-06 Production of semiconductor device Pending JPS5345178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12010576A JPS5345178A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12010576A JPS5345178A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5345178A true JPS5345178A (en) 1978-04-22

Family

ID=14778040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12010576A Pending JPS5345178A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5345178A (en)

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