JPS5342559A - Production of semiconductor elements - Google Patents

Production of semiconductor elements

Info

Publication number
JPS5342559A
JPS5342559A JP11758176A JP11758176A JPS5342559A JP S5342559 A JPS5342559 A JP S5342559A JP 11758176 A JP11758176 A JP 11758176A JP 11758176 A JP11758176 A JP 11758176A JP S5342559 A JPS5342559 A JP S5342559A
Authority
JP
Japan
Prior art keywords
wafer
cracking
forming
production
semiconductor elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11758176A
Other languages
Japanese (ja)
Inventor
Akira Yonashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11758176A priority Critical patent/JPS5342559A/en
Publication of JPS5342559A publication Critical patent/JPS5342559A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Dicing (AREA)

Abstract

PURPOSE: To reduce disintegration defects such as cracking and chipping by removing the electrode lead-out parts on a semiconductor wafer applied with diffusion treatment, forming an insulation film on the portion including cutting margin parts, forming a metal silicide layer in the electrode cut-out portions, thereafter exposing the wafer of the cutting margin portions, providing cutting grooves there, and cracking the wafer to pellets.
COPYRIGHT: (C)1978,JPO&Japio
JP11758176A 1976-09-29 1976-09-29 Production of semiconductor elements Pending JPS5342559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11758176A JPS5342559A (en) 1976-09-29 1976-09-29 Production of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11758176A JPS5342559A (en) 1976-09-29 1976-09-29 Production of semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5342559A true JPS5342559A (en) 1978-04-18

Family

ID=14715354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11758176A Pending JPS5342559A (en) 1976-09-29 1976-09-29 Production of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5342559A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55109295A (en) * 1979-02-12 1980-08-22 Mobil Tyco Solar Energy Corp Growth of crystal body and its device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55109295A (en) * 1979-02-12 1980-08-22 Mobil Tyco Solar Energy Corp Growth of crystal body and its device

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