JPS5341186A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5341186A JPS5341186A JP11632976A JP11632976A JPS5341186A JP S5341186 A JPS5341186 A JP S5341186A JP 11632976 A JP11632976 A JP 11632976A JP 11632976 A JP11632976 A JP 11632976A JP S5341186 A JPS5341186 A JP S5341186A
- Authority
- JP
- Japan
- Prior art keywords
- insulator film
- manufacture
- semiconductor device
- selectively
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11632976A JPS6040696B2 (ja) | 1976-09-28 | 1976-09-28 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11632976A JPS6040696B2 (ja) | 1976-09-28 | 1976-09-28 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5341186A true JPS5341186A (en) | 1978-04-14 |
JPS6040696B2 JPS6040696B2 (ja) | 1985-09-12 |
Family
ID=14684270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11632976A Expired JPS6040696B2 (ja) | 1976-09-28 | 1976-09-28 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6040696B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57172762A (en) * | 1981-04-16 | 1982-10-23 | Matsushita Electronics Corp | Semiconductor device and manufacture thereof |
-
1976
- 1976-09-28 JP JP11632976A patent/JPS6040696B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57172762A (en) * | 1981-04-16 | 1982-10-23 | Matsushita Electronics Corp | Semiconductor device and manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS6040696B2 (ja) | 1985-09-12 |
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