JPS5333581A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5333581A
JPS5333581A JP10779376A JP10779376A JPS5333581A JP S5333581 A JPS5333581 A JP S5333581A JP 10779376 A JP10779376 A JP 10779376A JP 10779376 A JP10779376 A JP 10779376A JP S5333581 A JPS5333581 A JP S5333581A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
semiconductor
flatten
stepping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10779376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113375B2 (enrdf_load_stackoverflow
Inventor
Hisao Katsuto
Shinichi Muramatsu
Sukeyoshi Tsunekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10779376A priority Critical patent/JPS5333581A/ja
Publication of JPS5333581A publication Critical patent/JPS5333581A/ja
Publication of JPS6113375B2 publication Critical patent/JPS6113375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP10779376A 1976-09-10 1976-09-10 Production of semiconductor device Granted JPS5333581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10779376A JPS5333581A (en) 1976-09-10 1976-09-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10779376A JPS5333581A (en) 1976-09-10 1976-09-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5333581A true JPS5333581A (en) 1978-03-29
JPS6113375B2 JPS6113375B2 (enrdf_load_stackoverflow) 1986-04-12

Family

ID=14468160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10779376A Granted JPS5333581A (en) 1976-09-10 1976-09-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5333581A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5656638A (en) * 1979-10-13 1981-05-18 Mitsubishi Electric Corp Pattern forming method
JPS57145327A (en) * 1981-03-04 1982-09-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor device
JPS57149738A (en) * 1981-03-11 1982-09-16 Agency Of Ind Science & Technol Forming method for solid film
JPS60500559A (ja) * 1983-02-25 1985-04-25 ヨハンソ−ン　ホ−カン 釣具

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5656638A (en) * 1979-10-13 1981-05-18 Mitsubishi Electric Corp Pattern forming method
JPS57145327A (en) * 1981-03-04 1982-09-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor device
JPS57149738A (en) * 1981-03-11 1982-09-16 Agency Of Ind Science & Technol Forming method for solid film
JPS60500559A (ja) * 1983-02-25 1985-04-25 ヨハンソ−ン　ホ−カン 釣具

Also Published As

Publication number Publication date
JPS6113375B2 (enrdf_load_stackoverflow) 1986-04-12

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