JPS5332676A - Method of removing underetched portions of thin layer for masks - Google Patents

Method of removing underetched portions of thin layer for masks

Info

Publication number
JPS5332676A
JPS5332676A JP10747576A JP10747576A JPS5332676A JP S5332676 A JPS5332676 A JP S5332676A JP 10747576 A JP10747576 A JP 10747576A JP 10747576 A JP10747576 A JP 10747576A JP S5332676 A JPS5332676 A JP S5332676A
Authority
JP
Japan
Prior art keywords
thin layer
portions
underetched
masks
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10747576A
Other languages
Japanese (ja)
Inventor
Toshio Tanaka
Jun Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10747576A priority Critical patent/JPS5332676A/en
Publication of JPS5332676A publication Critical patent/JPS5332676A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To remove the overhang portions of the thin mask film formed on substrate positively by using an etching solution which selectively reacts only with said thin layer.
COPYRIGHT: (C)1978,JPO&Japio
JP10747576A 1976-09-07 1976-09-07 Method of removing underetched portions of thin layer for masks Pending JPS5332676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10747576A JPS5332676A (en) 1976-09-07 1976-09-07 Method of removing underetched portions of thin layer for masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10747576A JPS5332676A (en) 1976-09-07 1976-09-07 Method of removing underetched portions of thin layer for masks

Publications (1)

Publication Number Publication Date
JPS5332676A true JPS5332676A (en) 1978-03-28

Family

ID=14460136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10747576A Pending JPS5332676A (en) 1976-09-07 1976-09-07 Method of removing underetched portions of thin layer for masks

Country Status (1)

Country Link
JP (1) JPS5332676A (en)

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