JPS5328377A - Method of ion etching - Google Patents
Method of ion etchingInfo
- Publication number
- JPS5328377A JPS5328377A JP10282576A JP10282576A JPS5328377A JP S5328377 A JPS5328377 A JP S5328377A JP 10282576 A JP10282576 A JP 10282576A JP 10282576 A JP10282576 A JP 10282576A JP S5328377 A JPS5328377 A JP S5328377A
- Authority
- JP
- Japan
- Prior art keywords
- ion etching
- etching
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10282576A JPS5328377A (en) | 1976-08-27 | 1976-08-27 | Method of ion etching |
US05/924,066 US4233109A (en) | 1976-01-16 | 1978-07-12 | Dry etching method |
US06/166,700 US4371412A (en) | 1976-01-16 | 1980-07-03 | Dry etching apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10282576A JPS5328377A (en) | 1976-08-27 | 1976-08-27 | Method of ion etching |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5328377A true JPS5328377A (en) | 1978-03-16 |
JPS573213B2 JPS573213B2 (fr) | 1982-01-20 |
Family
ID=14337788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10282576A Granted JPS5328377A (en) | 1976-01-16 | 1976-08-27 | Method of ion etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5328377A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5781967A (en) * | 1980-11-06 | 1982-05-22 | Matsushita Electric Ind Co Ltd | Feed roller for planetary system electrode wire feeder |
-
1976
- 1976-08-27 JP JP10282576A patent/JPS5328377A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5781967A (en) * | 1980-11-06 | 1982-05-22 | Matsushita Electric Ind Co Ltd | Feed roller for planetary system electrode wire feeder |
Also Published As
Publication number | Publication date |
---|---|
JPS573213B2 (fr) | 1982-01-20 |
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