JPS5326591A - Production of image pickup unit using charge transfer element - Google Patents
Production of image pickup unit using charge transfer elementInfo
- Publication number
- JPS5326591A JPS5326591A JP10092876A JP10092876A JPS5326591A JP S5326591 A JPS5326591 A JP S5326591A JP 10092876 A JP10092876 A JP 10092876A JP 10092876 A JP10092876 A JP 10092876A JP S5326591 A JPS5326591 A JP S5326591A
- Authority
- JP
- Japan
- Prior art keywords
- image pickup
- pickup unit
- production
- charge transfer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:A porous semiconductor layer of a prescribed thickness is formed within the prescribed region of the reverse face of a substrate by anode formation, and is eliminated from the substrate by etching after impurity is doped at a high density in this layer. As a result, the photosensitive area of the substrate becomes thin, so that an image pickup unit of the back illumination type where dark current and white damage occurrence is reduced can be obtianed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10092876A JPS5326591A (en) | 1976-08-24 | 1976-08-24 | Production of image pickup unit using charge transfer element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10092876A JPS5326591A (en) | 1976-08-24 | 1976-08-24 | Production of image pickup unit using charge transfer element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5326591A true JPS5326591A (en) | 1978-03-11 |
Family
ID=14287002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10092876A Pending JPS5326591A (en) | 1976-08-24 | 1976-08-24 | Production of image pickup unit using charge transfer element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5326591A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1048939A1 (en) * | 1998-01-16 | 2000-11-02 | Hamamatsu Photonics K.K. | Imaging apparatus |
US10428875B2 (en) | 2014-03-22 | 2019-10-01 | Ntn Corporation | Cooling structure for bearing device |
-
1976
- 1976-08-24 JP JP10092876A patent/JPS5326591A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1048939A1 (en) * | 1998-01-16 | 2000-11-02 | Hamamatsu Photonics K.K. | Imaging apparatus |
US10428875B2 (en) | 2014-03-22 | 2019-10-01 | Ntn Corporation | Cooling structure for bearing device |
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