JPS5586172A - Manufacture of semiconductor pickup device - Google Patents
Manufacture of semiconductor pickup deviceInfo
- Publication number
- JPS5586172A JPS5586172A JP16086478A JP16086478A JPS5586172A JP S5586172 A JPS5586172 A JP S5586172A JP 16086478 A JP16086478 A JP 16086478A JP 16086478 A JP16086478 A JP 16086478A JP S5586172 A JPS5586172 A JP S5586172A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating film
- film
- sio
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE: To improve pickup efficiency and make uniform pickup performance for each picture element by providing a thin film part and a thick film part in a photo gate electrode.
CONSTITUTION: After insulating film IF1 consisting of SiO2 film has been coated on the upper surface of semiconductor substrate SUB, poly Si, which is to become light-transmitting photo gate electrode Ep, is fitted on it. Next, by heat-oxidizing substrate SUB, insulating film IF3 is formed on it including the upper surface of electrode Ep. Subsequently, after coating the entire surface of insulating film IF3 with poly Si, transfer gate electrodes TG1 and TG2 are formed by patternizing on the sides of electrode Ep. Next, a part of the oxide film lying on electrode Ep is removed and a part D of electrode Ep is exposed. By operating heat oxidization again, insulating film IF4 consisting of SiO2 is formed on the upper surface of electrode Ep, TG1 and TG2. As a result, thick film part Ep2 and thin film part Ep1 are formed in electrode Ep.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16086478A JPS5586172A (en) | 1978-12-22 | 1978-12-22 | Manufacture of semiconductor pickup device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16086478A JPS5586172A (en) | 1978-12-22 | 1978-12-22 | Manufacture of semiconductor pickup device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586172A true JPS5586172A (en) | 1980-06-28 |
Family
ID=15724017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16086478A Pending JPS5586172A (en) | 1978-12-22 | 1978-12-22 | Manufacture of semiconductor pickup device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586172A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01227470A (en) * | 1988-03-08 | 1989-09-11 | Toshiba Corp | Solid-state image sensing device |
JPH01268164A (en) * | 1988-04-20 | 1989-10-25 | Toshiba Corp | Solid-state image sensor |
-
1978
- 1978-12-22 JP JP16086478A patent/JPS5586172A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01227470A (en) * | 1988-03-08 | 1989-09-11 | Toshiba Corp | Solid-state image sensing device |
JPH01268164A (en) * | 1988-04-20 | 1989-10-25 | Toshiba Corp | Solid-state image sensor |
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