JPS5326283A - Bell jar for vacuum evaporation - Google Patents

Bell jar for vacuum evaporation

Info

Publication number
JPS5326283A
JPS5326283A JP9973676A JP9973676A JPS5326283A JP S5326283 A JPS5326283 A JP S5326283A JP 9973676 A JP9973676 A JP 9973676A JP 9973676 A JP9973676 A JP 9973676A JP S5326283 A JPS5326283 A JP S5326283A
Authority
JP
Japan
Prior art keywords
bell jar
vacuum evaporation
substrate
heat conductive
conductive leaf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9973676A
Other languages
Japanese (ja)
Inventor
Yoshiya Ueda
Kazuhide Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9973676A priority Critical patent/JPS5326283A/en
Publication of JPS5326283A publication Critical patent/JPS5326283A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To uniformly transmit the treating temperature to the substrate, by heating or cooling the part of heat conductive leaf film, after exhausting the air in bell jar, closely adhered the substrate with heat conductive leaf film.
JP9973676A 1976-08-23 1976-08-23 Bell jar for vacuum evaporation Pending JPS5326283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9973676A JPS5326283A (en) 1976-08-23 1976-08-23 Bell jar for vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9973676A JPS5326283A (en) 1976-08-23 1976-08-23 Bell jar for vacuum evaporation

Publications (1)

Publication Number Publication Date
JPS5326283A true JPS5326283A (en) 1978-03-10

Family

ID=14255315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9973676A Pending JPS5326283A (en) 1976-08-23 1976-08-23 Bell jar for vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS5326283A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4497277A (en) * 1982-03-09 1985-02-05 Heraeus-Quarzschmelze Bell of opaque fused silica

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4497277A (en) * 1982-03-09 1985-02-05 Heraeus-Quarzschmelze Bell of opaque fused silica

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