JPS5243787A - Substrate heating unit for evaporation apparatus, etc. - Google Patents

Substrate heating unit for evaporation apparatus, etc.

Info

Publication number
JPS5243787A
JPS5243787A JP12006775A JP12006775A JPS5243787A JP S5243787 A JPS5243787 A JP S5243787A JP 12006775 A JP12006775 A JP 12006775A JP 12006775 A JP12006775 A JP 12006775A JP S5243787 A JPS5243787 A JP S5243787A
Authority
JP
Japan
Prior art keywords
heating unit
evaporation apparatus
substrate heating
rapidly
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12006775A
Other languages
Japanese (ja)
Inventor
Eiki Okamoto
Yoshikane Ida
Satoru Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP12006775A priority Critical patent/JPS5243787A/en
Publication of JPS5243787A publication Critical patent/JPS5243787A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A substrate heating unit which can minimize heat transfer loss during heating substrates of an evaporation apparatus, etc. and can heat them rapidly and uniformly.
JP12006775A 1975-10-03 1975-10-03 Substrate heating unit for evaporation apparatus, etc. Pending JPS5243787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12006775A JPS5243787A (en) 1975-10-03 1975-10-03 Substrate heating unit for evaporation apparatus, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12006775A JPS5243787A (en) 1975-10-03 1975-10-03 Substrate heating unit for evaporation apparatus, etc.

Publications (1)

Publication Number Publication Date
JPS5243787A true JPS5243787A (en) 1977-04-06

Family

ID=14777059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12006775A Pending JPS5243787A (en) 1975-10-03 1975-10-03 Substrate heating unit for evaporation apparatus, etc.

Country Status (1)

Country Link
JP (1) JPS5243787A (en)

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