JPS5325717B2 - - Google Patents

Info

Publication number
JPS5325717B2
JPS5325717B2 JP6665975A JP6665975A JPS5325717B2 JP S5325717 B2 JPS5325717 B2 JP S5325717B2 JP 6665975 A JP6665975 A JP 6665975A JP 6665975 A JP6665975 A JP 6665975A JP S5325717 B2 JPS5325717 B2 JP S5325717B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6665975A
Other languages
Japanese (ja)
Other versions
JPS519083A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS519083A publication Critical patent/JPS519083A/ja
Publication of JPS5325717B2 publication Critical patent/JPS5325717B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6665975A 1974-06-27 1975-06-04 Expired JPS5325717B2 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/483,511 US3953281A (en) 1974-06-27 1974-06-27 Method and system for growing monocrystalline ingots

Publications (2)

Publication Number Publication Date
JPS519083A JPS519083A (en:Method) 1976-01-24
JPS5325717B2 true JPS5325717B2 (en:Method) 1978-07-28

Family

ID=23920354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6665975A Expired JPS5325717B2 (en:Method) 1974-06-27 1975-06-04

Country Status (6)

Country Link
US (1) US3953281A (en:Method)
JP (1) JPS5325717B2 (en:Method)
DE (1) DE2522611C2 (en:Method)
FR (1) FR2276095A1 (en:Method)
GB (1) GB1447222A (en:Method)
IT (1) IT1038098B (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105312U (ja) * 1991-02-20 1992-09-10 株式会社中村多喜彌商店 網目天井材用吊り具
WO1996033301A1 (en) * 1995-04-21 1996-10-24 Shin-Etsu Handotai Co., Ltd. Method and equipment for growing single crystals

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106451U (en:Method) * 1976-02-04 1977-08-13
US4201746A (en) * 1976-12-27 1980-05-06 Monsanto Company Apparatus for zone refining
US4045181A (en) * 1976-12-27 1977-08-30 Monsanto Company Apparatus for zone refining
US4235848A (en) * 1978-06-15 1980-11-25 Apilat Vitaly Y Apparatus for pulling single crystal from melt on a seed
FR2433970B1 (fr) * 1978-08-25 1981-01-30 Gnii Redkometa Dispositif pour le tirage d'un monocristal sur une amorce a partir d'un bain de fusion
US4360499A (en) * 1981-06-22 1982-11-23 Rca Corporation Bellows assembly for crystal ribbon puller
US4511428A (en) * 1982-07-09 1985-04-16 International Business Machines Corporation Method of controlling oxygen content and distribution in grown silicon crystals
DE3743951A1 (de) * 1986-12-26 1988-07-07 Toshiba Ceramics Co Einrichtung zum ziehen von siliziumeinkristallen mit einem waermeisolierzylinder und verfahren zur herstellung des materials desselben
JPH06456Y2 (ja) * 1989-08-29 1994-01-05 信越半導体株式会社 単結晶引上装置のシール構造
JPH04260686A (ja) * 1991-02-08 1992-09-16 Shin Etsu Handotai Co Ltd 単結晶引上装置
JP3488531B2 (ja) * 1994-12-19 2004-01-19 コマツ電子金属株式会社 多結晶棒の吊り具
US5911825A (en) * 1997-09-30 1999-06-15 Seh America, Inc. Low oxygen heater
JP3694736B2 (ja) * 2001-06-12 2005-09-14 独立行政法人産業技術総合研究所 酸化亜鉛単結晶の製造方法
US20220298671A1 (en) * 2021-03-18 2022-09-22 Linton Crystal Technologies Corp. Crystal growing assembly with combination lift arm and winch

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US396430A (en) * 1889-01-22 Helm reichel
US719466A (en) * 1902-03-08 1903-02-03 Nelson Hiss Traction apparatus.
US3173765A (en) * 1955-03-18 1965-03-16 Itt Method of making crystalline silicon semiconductor material
US3275417A (en) * 1963-10-15 1966-09-27 Texas Instruments Inc Production of dislocation-free silicon single crystals
US3337303A (en) * 1965-03-01 1967-08-22 Elmat Corp Crystal growing apparatus
US3650701A (en) * 1970-07-22 1972-03-21 Commissariat Energie Atomique Apparatus for growing crystalline bodies
US3679370A (en) * 1970-07-31 1972-07-25 Western Electric Co Crystal grower with expandable chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105312U (ja) * 1991-02-20 1992-09-10 株式会社中村多喜彌商店 網目天井材用吊り具
WO1996033301A1 (en) * 1995-04-21 1996-10-24 Shin-Etsu Handotai Co., Ltd. Method and equipment for growing single crystals

Also Published As

Publication number Publication date
US3953281A (en) 1976-04-27
JPS519083A (en:Method) 1976-01-24
DE2522611C2 (de) 1985-11-14
IT1038098B (it) 1979-11-20
FR2276095B1 (en:Method) 1977-04-15
DE2522611A1 (de) 1976-01-15
GB1447222A (en) 1976-08-25
FR2276095A1 (fr) 1976-01-23

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