JPS5323562A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5323562A
JPS5323562A JP9788776A JP9788776A JPS5323562A JP S5323562 A JPS5323562 A JP S5323562A JP 9788776 A JP9788776 A JP 9788776A JP 9788776 A JP9788776 A JP 9788776A JP S5323562 A JPS5323562 A JP S5323562A
Authority
JP
Japan
Prior art keywords
semiconductor device
soaking
suppress
variations
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9788776A
Other languages
Japanese (ja)
Inventor
Kazutoshi Kamibayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9788776A priority Critical patent/JPS5323562A/en
Publication of JPS5323562A publication Critical patent/JPS5323562A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To suppress the variations in barrier height and internal resistance at the time of heat treatment by soaking at least 0.5% of Si in the thin Al film deposited on a semiconductor substrate surface in order to form Schottky barrier diodes.
COPYRIGHT: (C)1978,JPO&Japio
JP9788776A 1976-08-17 1976-08-17 Semiconductor device Pending JPS5323562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9788776A JPS5323562A (en) 1976-08-17 1976-08-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9788776A JPS5323562A (en) 1976-08-17 1976-08-17 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5323562A true JPS5323562A (en) 1978-03-04

Family

ID=14204250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9788776A Pending JPS5323562A (en) 1976-08-17 1976-08-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5323562A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548302A (en) * 1977-06-17 1979-01-22 Bridgestone Corp Tire for agricultural machine
JPS5438203U (en) * 1977-08-23 1979-03-13
JPS5839503A (en) * 1981-08-17 1983-03-08 バイエル・アクチエンゲゼルシヤフト Pneumatic tire for heavy load
JPS6081861A (en) * 1983-10-11 1985-05-09 Matsushita Electric Ind Co Ltd Schottky barrier semiconductor device
JPH01138755A (en) * 1987-08-28 1989-05-31 Fujitsu Ltd Semiconductor device
US6303995B1 (en) 1996-01-11 2001-10-16 Lsi Logic Corporation Sidewall structure for metal interconnect and method of making same
JP2015192016A (en) * 2014-03-28 2015-11-02 トヨタ自動車株式会社 Semiconductor device manufacturing method and semiconductor device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548302A (en) * 1977-06-17 1979-01-22 Bridgestone Corp Tire for agricultural machine
JPS5729281B2 (en) * 1977-06-17 1982-06-22
JPS5438203U (en) * 1977-08-23 1979-03-13
JPS572161Y2 (en) * 1977-08-23 1982-01-14
JPS5839503A (en) * 1981-08-17 1983-03-08 バイエル・アクチエンゲゼルシヤフト Pneumatic tire for heavy load
JPS6081861A (en) * 1983-10-11 1985-05-09 Matsushita Electric Ind Co Ltd Schottky barrier semiconductor device
JPH01138755A (en) * 1987-08-28 1989-05-31 Fujitsu Ltd Semiconductor device
US6303995B1 (en) 1996-01-11 2001-10-16 Lsi Logic Corporation Sidewall structure for metal interconnect and method of making same
JP2015192016A (en) * 2014-03-28 2015-11-02 トヨタ自動車株式会社 Semiconductor device manufacturing method and semiconductor device

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