JPS5322763A - Method of measuring surface with interference - Google Patents

Method of measuring surface with interference

Info

Publication number
JPS5322763A
JPS5322763A JP8573977A JP8573977A JPS5322763A JP S5322763 A JPS5322763 A JP S5322763A JP 8573977 A JP8573977 A JP 8573977A JP 8573977 A JP8573977 A JP 8573977A JP S5322763 A JPS5322763 A JP S5322763A
Authority
JP
Japan
Prior art keywords
interference
measuring surface
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8573977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616921B2 (enExample
Inventor
Jieeritsushiyu Uorutaa
Makotsushiyu Giyuntaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5322763A publication Critical patent/JPS5322763A/ja
Publication of JPS616921B2 publication Critical patent/JPS616921B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP8573977A 1976-08-13 1977-07-19 Method of measuring surface with interference Granted JPS5322763A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762636498 DE2636498C2 (de) 1976-08-13 1976-08-13 Verfahren zur interferometrischen Oberflächenmessiing

Publications (2)

Publication Number Publication Date
JPS5322763A true JPS5322763A (en) 1978-03-02
JPS616921B2 JPS616921B2 (enExample) 1986-03-03

Family

ID=5985380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8573977A Granted JPS5322763A (en) 1976-08-13 1977-07-19 Method of measuring surface with interference

Country Status (4)

Country Link
JP (1) JPS5322763A (enExample)
DE (1) DE2636498C2 (enExample)
FR (1) FR2361630A1 (enExample)
GB (1) GB1538811A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2758149C2 (de) * 1977-12-27 1979-10-04 Ibm Deutschland Gmbh, 7000 Stuttgart Interferometrisches Verfahren mit λ /4-Auflösung zur Abstands-, Dicken- und/oder Ebenheitsmessung
DE2946493A1 (de) 1979-11-17 1981-05-21 Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt Verfahren und vorrichtung zur automatischen und beruehrungslosen qualitaetsbewertung optisch reflektierender oberflaechen
DE3175207D1 (en) * 1981-05-29 1986-10-02 Ibm Deutschland Process and device for interferometric evenness measurement
DE3173451D1 (en) * 1981-09-17 1986-02-20 Ibm Deutschland Method for interferometric surface topography
DE3174649D1 (en) * 1981-11-25 1986-06-19 Ibm Deutschland Phase balancing of an optical wave front
DE4318739C2 (de) * 1993-06-05 1997-07-03 Lamtech Lasermestechnik Gmbh Interferometer und Verfahren zur Messung der Topographie von Prüflingsoberflächen
DE10303364A1 (de) * 2003-01-29 2004-08-05 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Bestimmung des Höhenprofils eines Objekts

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962160A (enExample) * 1972-10-16 1974-06-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962160A (enExample) * 1972-10-16 1974-06-17

Also Published As

Publication number Publication date
JPS616921B2 (enExample) 1986-03-03
FR2361630B1 (enExample) 1980-12-19
DE2636498B1 (de) 1977-05-12
DE2636498C2 (de) 1979-02-01
FR2361630A1 (fr) 1978-03-10
GB1538811A (en) 1979-01-24

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