JPS616921B2 - - Google Patents
Info
- Publication number
- JPS616921B2 JPS616921B2 JP52085739A JP8573977A JPS616921B2 JP S616921 B2 JPS616921 B2 JP S616921B2 JP 52085739 A JP52085739 A JP 52085739A JP 8573977 A JP8573977 A JP 8573977A JP S616921 B2 JPS616921 B2 JP S616921B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762636498 DE2636498C2 (de) | 1976-08-13 | 1976-08-13 | Verfahren zur interferometrischen Oberflächenmessiing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5322763A JPS5322763A (en) | 1978-03-02 |
| JPS616921B2 true JPS616921B2 (enExample) | 1986-03-03 |
Family
ID=5985380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8573977A Granted JPS5322763A (en) | 1976-08-13 | 1977-07-19 | Method of measuring surface with interference |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5322763A (enExample) |
| DE (1) | DE2636498C2 (enExample) |
| FR (1) | FR2361630A1 (enExample) |
| GB (1) | GB1538811A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2758149C2 (de) * | 1977-12-27 | 1979-10-04 | Ibm Deutschland Gmbh, 7000 Stuttgart | Interferometrisches Verfahren mit λ /4-Auflösung zur Abstands-, Dicken- und/oder Ebenheitsmessung |
| DE2946493A1 (de) | 1979-11-17 | 1981-05-21 | Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt | Verfahren und vorrichtung zur automatischen und beruehrungslosen qualitaetsbewertung optisch reflektierender oberflaechen |
| EP0066030B1 (de) * | 1981-05-29 | 1986-08-27 | Ibm Deutschland Gmbh | Verfahren und Vorrichtung zur interferometrischen Ebenheitsmessung |
| DE3173451D1 (en) * | 1981-09-17 | 1986-02-20 | Ibm Deutschland | Method for interferometric surface topography |
| EP0079981B1 (de) * | 1981-11-25 | 1986-05-14 | Ibm Deutschland Gmbh | Phasen-Symmetrisierung optischer Wellenflächen |
| DE4318739C2 (de) * | 1993-06-05 | 1997-07-03 | Lamtech Lasermestechnik Gmbh | Interferometer und Verfahren zur Messung der Topographie von Prüflingsoberflächen |
| DE10303364A1 (de) * | 2003-01-29 | 2004-08-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Vorrichtung zur Bestimmung des Höhenprofils eines Objekts |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962160A (enExample) * | 1972-10-16 | 1974-06-17 |
-
1976
- 1976-08-13 DE DE19762636498 patent/DE2636498C2/de not_active Expired
-
1977
- 1977-06-21 FR FR7720043A patent/FR2361630A1/fr active Granted
- 1977-07-19 JP JP8573977A patent/JPS5322763A/ja active Granted
- 1977-08-10 GB GB3355377A patent/GB1538811A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2636498B1 (de) | 1977-05-12 |
| GB1538811A (en) | 1979-01-24 |
| DE2636498C2 (de) | 1979-02-01 |
| JPS5322763A (en) | 1978-03-02 |
| FR2361630B1 (enExample) | 1980-12-19 |
| FR2361630A1 (fr) | 1978-03-10 |