JPS5319762A - Mask device for x-ray exposure - Google Patents

Mask device for x-ray exposure

Info

Publication number
JPS5319762A
JPS5319762A JP9515476A JP9515476A JPS5319762A JP S5319762 A JPS5319762 A JP S5319762A JP 9515476 A JP9515476 A JP 9515476A JP 9515476 A JP9515476 A JP 9515476A JP S5319762 A JPS5319762 A JP S5319762A
Authority
JP
Japan
Prior art keywords
ray exposure
mask device
mask
make
render
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9515476A
Other languages
Japanese (ja)
Inventor
Takayuki Matsukawa
Hiroshi Koyama
Satoru Kawazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9515476A priority Critical patent/JPS5319762A/en
Publication of JPS5319762A publication Critical patent/JPS5319762A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make use of a thin film of a material composed mainly of a boron compound as a mask-supporting substrate to thereby make a reduction in the absorption loss of X-rays, improve the exposure efficiency and render the film transparent by a visible ray so as to permit easy alignment.
COPYRIGHT: (C)1978,JPO&Japio
JP9515476A 1976-08-09 1976-08-09 Mask device for x-ray exposure Pending JPS5319762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9515476A JPS5319762A (en) 1976-08-09 1976-08-09 Mask device for x-ray exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9515476A JPS5319762A (en) 1976-08-09 1976-08-09 Mask device for x-ray exposure

Publications (1)

Publication Number Publication Date
JPS5319762A true JPS5319762A (en) 1978-02-23

Family

ID=14129866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9515476A Pending JPS5319762A (en) 1976-08-09 1976-08-09 Mask device for x-ray exposure

Country Status (1)

Country Link
JP (1) JPS5319762A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55101945A (en) * 1979-01-31 1980-08-04 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask for exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55101945A (en) * 1979-01-31 1980-08-04 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask for exposure
JPS6054671B2 (en) * 1979-01-31 1985-11-30 超エル・エス・アイ技術研究組合 exposure mask

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