JPS53147467A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53147467A
JPS53147467A JP6259077A JP6259077A JPS53147467A JP S53147467 A JPS53147467 A JP S53147467A JP 6259077 A JP6259077 A JP 6259077A JP 6259077 A JP6259077 A JP 6259077A JP S53147467 A JPS53147467 A JP S53147467A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
prevent
junctions
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6259077A
Other languages
Japanese (ja)
Inventor
Yoshihisa Shimojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP6259077A priority Critical patent/JPS53147467A/en
Publication of JPS53147467A publication Critical patent/JPS53147467A/en
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To prevent damaging of PN junctions at the time of pellet isolating and prevent the formation of blade type edge parts on circumferential edges with a reverse mesa type device by forming mesa grooves having partially recesses on the bottom part.
COPYRIGHT: (C)1978,JPO&Japio
JP6259077A 1977-05-27 1977-05-27 Production of semiconductor device Granted JPS53147467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6259077A JPS53147467A (en) 1977-05-27 1977-05-27 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6259077A JPS53147467A (en) 1977-05-27 1977-05-27 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53147467A true JPS53147467A (en) 1978-12-22

Family

ID=13204677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6259077A Granted JPS53147467A (en) 1977-05-27 1977-05-27 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53147467A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5259925A (en) * 1992-06-05 1993-11-09 Mcdonnell Douglas Corporation Method of cleaning a plurality of semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5259925A (en) * 1992-06-05 1993-11-09 Mcdonnell Douglas Corporation Method of cleaning a plurality of semiconductor devices

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