JPS53147467A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53147467A JPS53147467A JP6259077A JP6259077A JPS53147467A JP S53147467 A JPS53147467 A JP S53147467A JP 6259077 A JP6259077 A JP 6259077A JP 6259077 A JP6259077 A JP 6259077A JP S53147467 A JPS53147467 A JP S53147467A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- prevent
- junctions
- pellet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent damaging of PN junctions at the time of pellet isolating and prevent the formation of blade type edge parts on circumferential edges with a reverse mesa type device by forming mesa grooves having partially recesses on the bottom part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6259077A JPS53147467A (en) | 1977-05-27 | 1977-05-27 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6259077A JPS53147467A (en) | 1977-05-27 | 1977-05-27 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53147467A true JPS53147467A (en) | 1978-12-22 |
Family
ID=13204677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6259077A Pending JPS53147467A (en) | 1977-05-27 | 1977-05-27 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53147467A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5259925A (en) * | 1992-06-05 | 1993-11-09 | Mcdonnell Douglas Corporation | Method of cleaning a plurality of semiconductor devices |
-
1977
- 1977-05-27 JP JP6259077A patent/JPS53147467A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5259925A (en) * | 1992-06-05 | 1993-11-09 | Mcdonnell Douglas Corporation | Method of cleaning a plurality of semiconductor devices |
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