JPS5333571A - Semiconductor wafer and its production - Google Patents
Semiconductor wafer and its productionInfo
- Publication number
- JPS5333571A JPS5333571A JP10816976A JP10816976A JPS5333571A JP S5333571 A JPS5333571 A JP S5333571A JP 10816976 A JP10816976 A JP 10816976A JP 10816976 A JP10816976 A JP 10816976A JP S5333571 A JPS5333571 A JP S5333571A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor wafer
- swirls
- expose
- make
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To make a semiconductor device of good characteristics with the wafer made by cutting semiconductor crystal so as not to let swirls expose on the surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10816976A JPS5333571A (en) | 1976-09-09 | 1976-09-09 | Semiconductor wafer and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10816976A JPS5333571A (en) | 1976-09-09 | 1976-09-09 | Semiconductor wafer and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333571A true JPS5333571A (en) | 1978-03-29 |
Family
ID=14477721
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10816976A Pending JPS5333571A (en) | 1976-09-09 | 1976-09-09 | Semiconductor wafer and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333571A (en) |
-
1976
- 1976-09-09 JP JP10816976A patent/JPS5333571A/en active Pending
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