JPS53144369A - Flatness inspecting apparatus - Google Patents

Flatness inspecting apparatus

Info

Publication number
JPS53144369A
JPS53144369A JP5918977A JP5918977A JPS53144369A JP S53144369 A JPS53144369 A JP S53144369A JP 5918977 A JP5918977 A JP 5918977A JP 5918977 A JP5918977 A JP 5918977A JP S53144369 A JPS53144369 A JP S53144369A
Authority
JP
Japan
Prior art keywords
specimen
inspecting apparatus
letting
holding frame
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5918977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS578405B2 (enExample
Inventor
Hisanori Umitsuma
Haruo Hakamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP5918977A priority Critical patent/JPS53144369A/ja
Publication of JPS53144369A publication Critical patent/JPS53144369A/ja
Publication of JPS578405B2 publication Critical patent/JPS578405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5918977A 1977-05-21 1977-05-21 Flatness inspecting apparatus Granted JPS53144369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5918977A JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5918977A JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS53144369A true JPS53144369A (en) 1978-12-15
JPS578405B2 JPS578405B2 (enExample) 1982-02-16

Family

ID=13106205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5918977A Granted JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS53144369A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8659979B2 (en) 2009-11-30 2014-02-25 Casio Computer Co., Ltd Inner frame and case unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8659979B2 (en) 2009-11-30 2014-02-25 Casio Computer Co., Ltd Inner frame and case unit

Also Published As

Publication number Publication date
JPS578405B2 (enExample) 1982-02-16

Similar Documents

Publication Publication Date Title
JPS5433683A (en) Air seal mounting for light emitting element
JPS5330865A (en) Electron microscope provided with sample irradiating electron beam quantity measuring unit
JPS53144369A (en) Flatness inspecting apparatus
JPS5318967A (en) Wafer sucking jig
JPS51138464A (en) Device for detecting relative position of plural articles
JPS5439576A (en) Inspection method for semiconductor device
JPS524867A (en) Optical measuring method and its device
JPS51113572A (en) Centering method for electronic ray picture and the unit using the sai d method
JPS543587A (en) Inspecting apparatus
JPS5387258A (en) Measuring device
JPS5389321A (en) Preventing device for mis-selection
JPS52156552A (en) Wafer inspection apparatus
JPS57115843A (en) Testing device for wafer
JPS5216171A (en) Mask fitting device
JPS5224554A (en) Surface inspection device
JPS543295A (en) Inspection for defect of bubble garnet
JPS52104865A (en) X-ray analysis apparatus in electronic microscope or like
JPS5334535A (en) Observation object supporting system
JPS5371A (en) Scribing method of semiconductor wafer
JPS5232271A (en) Inspection method and equipment for photomask pattern
JPS5442635A (en) Inspection method
JPS532074A (en) Scribing method for semiconductor wafer
JPS5284976A (en) Contamination preventing method for sensitive corrosion-resistant resi ns
JPS51131917A (en) Pipe apparatus for fluid transport
JPS53394A (en) Irradiated fuel inspection device