JPS52104952A - Material inspection apparatus - Google Patents

Material inspection apparatus

Info

Publication number
JPS52104952A
JPS52104952A JP2141376A JP2141376A JPS52104952A JP S52104952 A JPS52104952 A JP S52104952A JP 2141376 A JP2141376 A JP 2141376A JP 2141376 A JP2141376 A JP 2141376A JP S52104952 A JPS52104952 A JP S52104952A
Authority
JP
Japan
Prior art keywords
inspection apparatus
material inspection
materials
corrected
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2141376A
Other languages
Japanese (ja)
Other versions
JPS5735420B2 (en
Inventor
Hiroyuki Ikeda
Katsumi Fujiwara
Seigo Igaki
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2141376A priority Critical patent/JPS52104952A/en
Publication of JPS52104952A publication Critical patent/JPS52104952A/en
Publication of JPS5735420B2 publication Critical patent/JPS5735420B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To keep the detection sensitivity of defected part always constant by means of radiating light beam on the materials to be corrected prior to the inspection of inspected materials, thereby correcting the sensitivity of optical detection section owing to the light from the part and material to be corrected.
COPYRIGHT: (C)1977,JPO&Japio
JP2141376A 1976-02-28 1976-02-28 Material inspection apparatus Granted JPS52104952A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2141376A JPS52104952A (en) 1976-02-28 1976-02-28 Material inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2141376A JPS52104952A (en) 1976-02-28 1976-02-28 Material inspection apparatus

Publications (2)

Publication Number Publication Date
JPS52104952A true JPS52104952A (en) 1977-09-02
JPS5735420B2 JPS5735420B2 (en) 1982-07-29

Family

ID=12054324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2141376A Granted JPS52104952A (en) 1976-02-28 1976-02-28 Material inspection apparatus

Country Status (1)

Country Link
JP (1) JPS52104952A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914632U (en) * 1972-05-08 1974-02-07
JPS5121413U (en) * 1975-08-08 1976-02-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914632U (en) * 1972-05-08 1974-02-07
JPS5121413U (en) * 1975-08-08 1976-02-17

Also Published As

Publication number Publication date
JPS5735420B2 (en) 1982-07-29

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