JPS53143354A - Nonncontact measuring method of distance or thickness - Google Patents

Nonncontact measuring method of distance or thickness

Info

Publication number
JPS53143354A
JPS53143354A JP5813778A JP5813778A JPS53143354A JP S53143354 A JPS53143354 A JP S53143354A JP 5813778 A JP5813778 A JP 5813778A JP 5813778 A JP5813778 A JP 5813778A JP S53143354 A JPS53143354 A JP S53143354A
Authority
JP
Japan
Prior art keywords
nonncontact
thickness
distance
measuring method
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5813778A
Other languages
English (en)
Inventor
Botorai Bikutaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS53143354A publication Critical patent/JPS53143354A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP5813778A 1977-05-18 1978-05-16 Nonncontact measuring method of distance or thickness Pending JPS53143354A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772722577 DE2722577A1 (de) 1977-05-18 1977-05-18 Vorrichtung/verfahren zur beruehrungsfreien abstands- bzw. dickenmessung

Publications (1)

Publication Number Publication Date
JPS53143354A true JPS53143354A (en) 1978-12-13

Family

ID=6009365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5813778A Pending JPS53143354A (en) 1977-05-18 1978-05-16 Nonncontact measuring method of distance or thickness

Country Status (7)

Country Link
US (1) US4201475A (ja)
JP (1) JPS53143354A (ja)
BE (1) BE867206A (ja)
DE (1) DE2722577A1 (ja)
FR (1) FR2391452A1 (ja)
GB (1) GB1604362A (ja)
IT (1) IT1095140B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144407U (ja) * 1982-03-31 1984-09-27 運輸省船舶技術研究所長 レ−ザ−散乱キヤビテイ厚み計測法および計測装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE412286B (sv) * 1978-07-10 1980-02-25 Saab Scania Ab Sett och anordning for fotoelektrisk avmetning av breder eller liknande geometriskt obestemda foremal
US4383168A (en) * 1980-06-02 1983-05-10 Raytheon Company Automatic focusing apparatus
US4501962A (en) * 1980-06-02 1985-02-26 Raytheon Company Method of focusing optical apparatus
DE3335396C2 (de) * 1983-09-29 1994-03-24 Viktor Dr Bodlaj Verfahren und Vorrichtung zum berührungslosen Messen eines Abstandes eines bestimmten Punktes einer Oberfläche von einer Bezugsebene
DE3335355C2 (de) * 1983-09-29 1994-03-24 Bodlaj Viktor Dr Verfahren und Vorrichtung zum berührungslosen Messen eines Abstandes eines bestimmten Punktes einer Oberfläche von einer Bezugsebene
DE3432252A1 (de) * 1984-09-01 1986-03-06 Fa. Carl Zeiss, 7920 Heidenheim Messmikroskop
US4687325A (en) * 1985-03-28 1987-08-18 General Electric Company Three-dimensional range camera
GB2222047A (en) * 1988-07-25 1990-02-21 Unisearch Ltd Optical mapping of field of view and information storage
US4943157A (en) * 1989-05-18 1990-07-24 Corning Incorporated Fiber optic triangulation gage
DE4119821A1 (de) * 1991-06-15 1992-12-17 Hauni Werke Koerber & Co Kg Verfahren und vorrichtung zum messen der haerte von queraxial gefoerderten stabfoermigen artikeln der tabakverarbeitenden industrie
US5311287A (en) * 1992-02-25 1994-05-10 International Business Machines Corporation Direct access storage device with head-disc dynamics monitor
IT1257404B (it) * 1992-09-30 1996-01-15 Comau Spa Procedimento per il controllo della posa di un cordone di silicone, particolarmente per la tenuta fra il basamento e la coppa di un motore a combustione interna.
US5362962A (en) * 1993-04-16 1994-11-08 Edison Welding Institute Method and apparatus for measuring pipeline corrosion
US6052191A (en) * 1998-10-13 2000-04-18 Northrop Grumman Corporation Coating thickness measurement system and method of measuring a coating thickness
US6285451B1 (en) * 1999-04-30 2001-09-04 John M. Herron Noncontacting optical method for determining thickness and related apparatus
US7280232B2 (en) * 2004-09-21 2007-10-09 Chapman Instruments, Inc. Method and apparatus for measuring wafer thickness
US7283256B2 (en) * 2004-09-21 2007-10-16 Chapman Instruments, Inc. Method and apparatus for measuring wafer thickness
CN102338680B (zh) * 2011-05-31 2013-04-24 哈尔滨工业大学 基于多光束激光外差二次谐波法与扭摆法测量微冲量的方法
CN102353491B (zh) * 2011-05-31 2013-06-26 哈尔滨工业大学 多普勒振镜正弦调制多光束激光外差二次谐波测量微冲量的方法
JP2014044060A (ja) * 2012-08-24 2014-03-13 Canon Inc 形状測定装置、および形状測定方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1803285A1 (de) * 1968-10-16 1970-05-06 Grundig Emv Automatische und beruehrungslose Dickenmessung an durchsichtigen Folien oder Platten
DE2508836C2 (de) * 1972-06-19 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Entfernungsmeßgerät
DE2325086C2 (de) * 1972-06-19 1985-05-02 Siemens AG, 1000 Berlin und 8000 München Entfernungsmeßgerät
IE39252B1 (en) * 1973-05-17 1978-08-30 Siemens Ag Improvements inor relating to distance measuring equipmen
DE2501015C2 (de) * 1975-01-13 1976-08-19 Siemens Ag Beruehrungsfreies Dickenmessverfahren
US4053234A (en) * 1975-02-18 1977-10-11 United Biscuits Limited Thickness measurement
DE2546714A1 (de) * 1975-10-17 1977-04-21 Siemens Ag Verfahren zum messen des abstandes von und der geschwindigkeitskomponente eines objektes senkrecht zu einer bezugslinie
DE2654478A1 (de) * 1976-12-01 1978-06-08 Siemens Ag Vorrichtung zur beruehrungsfreien dickenmessung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144407U (ja) * 1982-03-31 1984-09-27 運輸省船舶技術研究所長 レ−ザ−散乱キヤビテイ厚み計測法および計測装置

Also Published As

Publication number Publication date
US4201475A (en) 1980-05-06
GB1604362A (en) 1981-12-09
FR2391452A1 (fr) 1978-12-15
DE2722577A1 (de) 1978-11-30
FR2391452B1 (ja) 1982-03-05
IT7823263A0 (it) 1978-05-11
DE2722577C2 (ja) 1987-11-05
IT1095140B (it) 1985-08-10
BE867206A (fr) 1978-09-18

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