JPS53143176A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53143176A JPS53143176A JP5914277A JP5914277A JPS53143176A JP S53143176 A JPS53143176 A JP S53143176A JP 5914277 A JP5914277 A JP 5914277A JP 5914277 A JP5914277 A JP 5914277A JP S53143176 A JPS53143176 A JP S53143176A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- thin
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To improve adhesiveness and make Au diffusion even by interposing an active metal thin-film such as of Ti between Si substrate and Au thin-film at the time of diffusing Au in order to reduce the life time of collector region and increase switching speed.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5914277A JPS53143176A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5914277A JPS53143176A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53143176A true JPS53143176A (en) | 1978-12-13 |
Family
ID=13104769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5914277A Pending JPS53143176A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53143176A (en) |
-
1977
- 1977-05-20 JP JP5914277A patent/JPS53143176A/en active Pending
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