JPS53135348A - Etching method for multilayer film - Google Patents

Etching method for multilayer film

Info

Publication number
JPS53135348A
JPS53135348A JP4908977A JP4908977A JPS53135348A JP S53135348 A JPS53135348 A JP S53135348A JP 4908977 A JP4908977 A JP 4908977A JP 4908977 A JP4908977 A JP 4908977A JP S53135348 A JPS53135348 A JP S53135348A
Authority
JP
Japan
Prior art keywords
multilayer film
etching method
etching
film
quickly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4908977A
Other languages
English (en)
Other versions
JPS611509B2 (ja
Inventor
Kensaku Yano
Kenji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4908977A priority Critical patent/JPS53135348A/ja
Priority to US05/900,650 priority patent/US4313648A/en
Publication of JPS53135348A publication Critical patent/JPS53135348A/ja
Publication of JPS611509B2 publication Critical patent/JPS611509B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens
    • G—PHYSICS
    • G02—OPTICS
    • G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00—Optical parts
    • G02C7/10—Filters, e.g. for facilitating adaptation of the eyes to the dark; Sunglasses
    • G02C7/107—Interference colour filters

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)
  • ing And Chemical Polishing (AREA)
  • Color Television Image Signal Generators (AREA)
JP4908977A 1977-04-30 1977-04-30 Etching method for multilayer film Granted JPS53135348A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4908977A JPS53135348A (en) 1977-04-30 1977-04-30 Etching method for multilayer film
US05/900,650 US4313648A (en) 1977-04-30 1978-04-27 Patterned multi-layer structure and manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4908977A JPS53135348A (en) 1977-04-30 1977-04-30 Etching method for multilayer film

Publications (2)

Publication Number Publication Date
JPS53135348A true JPS53135348A (en) 1978-11-25
JPS611509B2 JPS611509B2 (ja) 1986-01-17

Family

ID=12821361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4908977A Granted JPS53135348A (en) 1977-04-30 1977-04-30 Etching method for multilayer film

Country Status (2)

Country Link
US (1) US4313648A (ja)
JP (1) JPS53135348A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589109A (ja) * 1981-06-30 1983-01-19 ピー・ピー・ジー・インダストリーズ・インコーポレーテッド カ−テンウオ−ル構成体およびその製造法

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US4574177A (en) * 1982-02-01 1986-03-04 Texas Instruments Incorporated Plasma etch method for TiO2
DE3239559A1 (de) * 1982-10-26 1984-04-26 Standard Elektrik Lorenz Ag, 7000 Stuttgart Verlustarmes korrekturfilter zur herstellung von leuchtschirmen fuer farbbildroehren
US4660934A (en) * 1984-03-21 1987-04-28 Kokusai Denshin Denwa Kabushiki Kaisha Method for manufacturing diffraction grating
JPS6278501A (ja) * 1985-10-02 1987-04-10 Hamamatsu Photonics Kk 反射防止膜をもつ光学装置
US4915463A (en) * 1988-10-18 1990-04-10 The United States Of America As Represented By The Department Of Energy Multilayer diffraction grating
CA2005096C (en) * 1988-12-13 1999-03-23 Tokinori Agou High light-transmissive dust-proof body and method of preparing same
US5119231A (en) * 1990-06-15 1992-06-02 Honeywell Inc. Hybrid diffractive optical filter
US5246803A (en) * 1990-07-23 1993-09-21 Eastman Kodak Company Patterned dichroic filters for solid state electronic image sensors
JPH04115044A (ja) * 1990-09-05 1992-04-15 Hiraki Igaki 断熱壁材、並びに断熱壁材を用いた壁体の施工方法
US5254202A (en) * 1992-04-07 1993-10-19 International Business Machines Corporation Fabrication of laser ablation masks by wet etching
TW278195B (ja) 1992-12-21 1996-06-11 Philips Electronics Nv
EP0677764B1 (en) * 1994-04-12 2002-01-23 Jax Holdings, Inc. An optical filter arrangement
US5907436A (en) * 1995-09-29 1999-05-25 The Regents Of The University Of California Multilayer dielectric diffraction gratings
DE19641303B4 (de) * 1995-10-10 2006-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines optischen Elementes
US5977162A (en) * 1996-09-16 1999-11-02 Seidman; Michael D. Therapeutic treatment for auditory function
CH693076A5 (de) * 1998-02-20 2003-02-14 Unaxis Trading Ag Verfahren zur Herstellung einer Farbfilterschichtsystem-Struktur auf einer Unterlage.
JP2001110801A (ja) * 1999-10-05 2001-04-20 Takeshi Yao パターン形成方法、並びに電子素子、光学素子及び回路基板
EP1354225A2 (en) * 2001-01-25 2003-10-22 Jax Holdings, Inc. Multi-layer thin film optical filter arrangement
US6754006B2 (en) * 2001-10-05 2004-06-22 General Atomics Hybrid metallic-dielectric grating
US7648808B2 (en) * 2004-01-12 2010-01-19 Ocean Thin Films, Inc. Patterned coated dichroic filter
US7256938B2 (en) * 2004-03-17 2007-08-14 General Atomics Method for making large scale multilayer dielectric diffraction gratings on thick substrates using reactive ion etching
US7233442B1 (en) * 2005-01-26 2007-06-19 Aculight Corporation Method and apparatus for spectral-beam combining of high-power fiber lasers
US7199924B1 (en) 2005-01-26 2007-04-03 Aculight Corporation Apparatus and method for spectral-beam combining of high-power fiber lasers
US7430352B2 (en) 2005-07-29 2008-09-30 Aculight Corporation Multi-segment photonic-crystal-rod waveguides for amplification of high-power pulsed optical radiation and associated method
US7391561B2 (en) 2005-07-29 2008-06-24 Aculight Corporation Fiber- or rod-based optical source featuring a large-core, rare-earth-doped photonic-crystal device for generation of high-power pulsed radiation and method
US7876803B1 (en) 2007-03-21 2011-01-25 Lockheed Martin Corporation High-power, pulsed ring fiber oscillator and method
US7680417B2 (en) * 2005-12-28 2010-03-16 Intel Corporation Bi-directional parallel optical link
WO2007103898A2 (en) * 2006-03-03 2007-09-13 Aculight Corporation Diode-laser-pump module with integrated signal ports for pumping amplifying fibers
US7554734B1 (en) 2006-04-28 2009-06-30 Johan Christer Holm Polarization independent grating
US7768700B1 (en) 2006-11-30 2010-08-03 Lockheed Martin Corporation Method and apparatus for optical gain fiber having segments of differing core sizes
JP2008041362A (ja) * 2006-08-03 2008-02-21 Fuji Electric Holdings Co Ltd パターン化された色変換層の製造方法、およびそれを用いた色変換フィルターおよび有機ｅｌディスプレイの製造方法。
US8179594B1 (en) 2007-06-29 2012-05-15 Lockheed Martin Corporation Method and apparatus for spectral-beam combining of fanned-in laser beams with chromatic-dispersion compensation using a plurality of diffractive gratings
US8116002B2 (en) * 2007-08-27 2012-02-14 Lumella Inc. Grating device with adjusting layer
US8526110B1 (en) 2009-02-17 2013-09-03 Lockheed Martin Corporation Spectral-beam combining for high-power fiber-ring-laser systems
US8133384B2 (en) 2009-03-02 2012-03-13 Harris Corporation Carbon strand radio frequency heating susceptor
JP2011100111A (ja) * 2009-10-09 2011-05-19 Seiko Epson Corp 光学物品、光学物品の製造方法、電子機器
US8755649B2 (en) * 2009-10-19 2014-06-17 Lockheed Martin Corporation In-line forward/backward fiber-optic signal analyzer
US8934509B2 (en) 2009-11-23 2015-01-13 Lockheed Martin Corporation Q-switched oscillator seed-source for MOPA laser illuminator method and apparatus
US8503840B2 (en) 2010-08-23 2013-08-06 Lockheed Martin Corporation Optical-fiber array method and apparatus
US8441718B2 (en) * 2009-11-23 2013-05-14 Lockheed Martin Corporation Spectrally beam combined laser system and method at eye-safer wavelengths
DE112011101288T5 (de) 2010-04-12 2013-02-07 Lockheed Martin Corporation Strahldiagnostik- und Rückkopplungssystem sowie Verfahren für spektralstrahlkombinierteLaser
DE102012013683B4 (de) * 2012-07-11 2021-04-29 Carl Zeiss Vision International Gmbh Brillenlinse, Verfahren zu deren Herstellung, Computerprogramm sowie Vorrichtung zur Herstellung einer Brillenlinse
US9366872B2 (en) 2014-02-18 2016-06-14 Lockheed Martin Corporation Apparatus and method for fiber-laser output-beam shaping for spectral beam combination
JP6552060B2 (ja) 2014-04-11 2019-07-31 ロッキード マーティン コーポレーション 非接触光パワー測定のためのシステム及び方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743586A (en) * 1971-04-05 1973-07-03 Rca Corp Method of making a color encoding filter assembly
US3914464A (en) * 1971-04-19 1975-10-21 Optical Coating Laboratory Inc Striped dichroic filter and method for making the same
US4004176A (en) * 1972-10-16 1977-01-18 Hitachi, Ltd. Stripe-shaped color separation filter for image pickup tube and method for manufacturing the same
JPS50147339A (ja) * 1974-05-16 1975-11-26
US4030967A (en) * 1976-08-16 1977-06-21 Northern Telecom Limited Gaseous plasma etching of aluminum and aluminum oxide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589109A (ja) * 1981-06-30 1983-01-19 ピー・ピー・ジー・インダストリーズ・インコーポレーテッド カ−テンウオ−ル構成体およびその製造法
JPH0315722B2 (ja) * 1981-06-30 1991-03-01 Ppg Industries Inc

Also Published As

Publication number Publication date
JPS611509B2 (ja) 1986-01-17
US4313648A (en) 1982-02-02

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