JPS53123797A - Ion source - Google Patents

Ion source

Info

Publication number
JPS53123797A
JPS53123797A JP3872677A JP3872677A JPS53123797A JP S53123797 A JPS53123797 A JP S53123797A JP 3872677 A JP3872677 A JP 3872677A JP 3872677 A JP3872677 A JP 3872677A JP S53123797 A JPS53123797 A JP S53123797A
Authority
JP
Japan
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3872677A
Other languages
English (en)
Other versions
JPS6041820B2 (ja
Inventor
Toshinori Takagi
Tetsuyoshi Katou
Kouji Matsuda
Kouji Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP3872677A priority Critical patent/JPS6041820B2/ja
Publication of JPS53123797A publication Critical patent/JPS53123797A/ja
Publication of JPS6041820B2 publication Critical patent/JPS6041820B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3872677A 1977-04-05 1977-04-05 イオン源装置 Expired JPS6041820B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3872677A JPS6041820B2 (ja) 1977-04-05 1977-04-05 イオン源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3872677A JPS6041820B2 (ja) 1977-04-05 1977-04-05 イオン源装置

Publications (2)

Publication Number Publication Date
JPS53123797A true JPS53123797A (en) 1978-10-28
JPS6041820B2 JPS6041820B2 (ja) 1985-09-19

Family

ID=12533319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3872677A Expired JPS6041820B2 (ja) 1977-04-05 1977-04-05 イオン源装置

Country Status (1)

Country Link
JP (1) JPS6041820B2 (ja)

Also Published As

Publication number Publication date
JPS6041820B2 (ja) 1985-09-19

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