JPS53123797A - Ion source - Google Patents
Ion sourceInfo
- Publication number
- JPS53123797A JPS53123797A JP3872677A JP3872677A JPS53123797A JP S53123797 A JPS53123797 A JP S53123797A JP 3872677 A JP3872677 A JP 3872677A JP 3872677 A JP3872677 A JP 3872677A JP S53123797 A JPS53123797 A JP S53123797A
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3872677A JPS6041820B2 (ja) | 1977-04-05 | 1977-04-05 | イオン源装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3872677A JPS6041820B2 (ja) | 1977-04-05 | 1977-04-05 | イオン源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53123797A true JPS53123797A (en) | 1978-10-28 |
JPS6041820B2 JPS6041820B2 (ja) | 1985-09-19 |
Family
ID=12533319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3872677A Expired JPS6041820B2 (ja) | 1977-04-05 | 1977-04-05 | イオン源装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041820B2 (ja) |
-
1977
- 1977-04-05 JP JP3872677A patent/JPS6041820B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6041820B2 (ja) | 1985-09-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52125998A (en) | Ion source | |
HU179482B (en) | Penning pulverizel source | |
BG30612A3 (en) | Antidot means | |
GB2003318B (en) | Tandem ion accelerators | |
JPS5641659A (en) | Xxray source | |
BG32412A3 (en) | Akaracide means | |
JPS53123798A (en) | Ion generator | |
JPS5663799A (en) | Ion source | |
JPS5679900A (en) | Ion source | |
GB2014355B (en) | Ion sources | |
JPS53140498A (en) | Ion source | |
JPS5424627A (en) | Removinggagent for phtoresist | |
JPS5438776A (en) | Fet | |
GB2028575B (en) | Ion sources | |
JPS5482796A (en) | Ion source | |
JPS51123196A (en) | Ion source | |
GB1543530A (en) | Ion source | |
JPS5452461A (en) | Ion source | |
JPS5410941A (en) | Power source | |
JPS53112696A (en) | Ion generator | |
JPS5459870A (en) | Ion source unit | |
AU4076678A (en) | Nd catalystused therein | |
JPS53123797A (en) | Ion source | |
GB2061608B (en) | Ion sources | |
JPS5484772A (en) | Reference voltage source |