JPS53123662A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53123662A JPS53123662A JP3887477A JP3887477A JPS53123662A JP S53123662 A JPS53123662 A JP S53123662A JP 3887477 A JP3887477 A JP 3887477A JP 3887477 A JP3887477 A JP 3887477A JP S53123662 A JPS53123662 A JP S53123662A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- film
- opening
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain an excellent wiring without using aqua regia, by providing an opening to the insulating film adhered onto a Si substrate, by vapor-depositing a metal-wiring film on it after providing a photo resist film with an opening, and by leaving the wiring film only in the opening part by removing the resist film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3887477A JPS53123662A (en) | 1977-04-04 | 1977-04-04 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3887477A JPS53123662A (en) | 1977-04-04 | 1977-04-04 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53123662A true JPS53123662A (en) | 1978-10-28 |
Family
ID=12537349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3887477A Pending JPS53123662A (en) | 1977-04-04 | 1977-04-04 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53123662A (en) |
-
1977
- 1977-04-04 JP JP3887477A patent/JPS53123662A/en active Pending
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