JPS53123657A - Production of semiconductor unit - Google Patents

Production of semiconductor unit

Info

Publication number
JPS53123657A
JPS53123657A JP3886277A JP3886277A JPS53123657A JP S53123657 A JPS53123657 A JP S53123657A JP 3886277 A JP3886277 A JP 3886277A JP 3886277 A JP3886277 A JP 3886277A JP S53123657 A JPS53123657 A JP S53123657A
Authority
JP
Japan
Prior art keywords
production
film
semiconductor unit
resistor film
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3886277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156617B2 (enrdf_load_stackoverflow
Inventor
Masatake Saito
Hideyuki Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3886277A priority Critical patent/JPS53123657A/ja
Publication of JPS53123657A publication Critical patent/JPS53123657A/ja
Publication of JPS6156617B2 publication Critical patent/JPS6156617B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
  • Dicing (AREA)
JP3886277A 1977-04-04 1977-04-04 Production of semiconductor unit Granted JPS53123657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3886277A JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3886277A JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Publications (2)

Publication Number Publication Date
JPS53123657A true JPS53123657A (en) 1978-10-28
JPS6156617B2 JPS6156617B2 (enrdf_load_stackoverflow) 1986-12-03

Family

ID=12537004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3886277A Granted JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS53123657A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762536A (en) * 1980-10-01 1982-04-15 Nec Corp Manufacture of semiconductor device
US5661091A (en) * 1992-12-23 1997-08-26 U.S. Philips Corporation Method of manufacturing a semiconductor device having PN junctions separated by depressions
JP2005086160A (ja) * 2003-09-11 2005-03-31 Disco Abrasive Syst Ltd ウエーハの加工方法
JP2006203251A (ja) * 2004-10-07 2006-08-03 Showa Denko Kk 半導体素子の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852374A (enrdf_load_stackoverflow) * 1971-11-02 1973-07-23
JPS49122278A (enrdf_load_stackoverflow) * 1973-03-22 1974-11-22
JPS5629383A (en) * 1979-08-17 1981-03-24 Nippon Telegr & Teleph Corp <Ntt> Manufacture of tunnel-junction type josephson element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852374A (enrdf_load_stackoverflow) * 1971-11-02 1973-07-23
JPS49122278A (enrdf_load_stackoverflow) * 1973-03-22 1974-11-22
JPS5629383A (en) * 1979-08-17 1981-03-24 Nippon Telegr & Teleph Corp <Ntt> Manufacture of tunnel-junction type josephson element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762536A (en) * 1980-10-01 1982-04-15 Nec Corp Manufacture of semiconductor device
US5661091A (en) * 1992-12-23 1997-08-26 U.S. Philips Corporation Method of manufacturing a semiconductor device having PN junctions separated by depressions
JP2005086160A (ja) * 2003-09-11 2005-03-31 Disco Abrasive Syst Ltd ウエーハの加工方法
JP2006203251A (ja) * 2004-10-07 2006-08-03 Showa Denko Kk 半導体素子の製造方法

Also Published As

Publication number Publication date
JPS6156617B2 (enrdf_load_stackoverflow) 1986-12-03

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