JPS53120395A - Production of avalanche photo diode - Google Patents

Production of avalanche photo diode

Info

Publication number
JPS53120395A
JPS53120395A JP3643277A JP3643277A JPS53120395A JP S53120395 A JPS53120395 A JP S53120395A JP 3643277 A JP3643277 A JP 3643277A JP 3643277 A JP3643277 A JP 3643277A JP S53120395 A JPS53120395 A JP S53120395A
Authority
JP
Japan
Prior art keywords
production
photo diode
avalanche photo
sicry
stal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3643277A
Other languages
Japanese (ja)
Inventor
Katsuhiko Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3643277A priority Critical patent/JPS53120395A/en
Publication of JPS53120395A publication Critical patent/JPS53120395A/en
Pending legal-status Critical Current

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  • Light Receiving Elements (AREA)

Abstract

PURPOSE: To obtain an element which operates on low voltage and has a good SN ratio for infrared light by implanting group III atomic ions such as boron of specified dose into a P type Sicry stal and performing drive-in diffusion while defining also the concentration distribution standard deviation of the implanted atoms.
COPYRIGHT: (C)1978,JPO&Japio
JP3643277A 1977-03-30 1977-03-30 Production of avalanche photo diode Pending JPS53120395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3643277A JPS53120395A (en) 1977-03-30 1977-03-30 Production of avalanche photo diode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3643277A JPS53120395A (en) 1977-03-30 1977-03-30 Production of avalanche photo diode

Publications (1)

Publication Number Publication Date
JPS53120395A true JPS53120395A (en) 1978-10-20

Family

ID=12469641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3643277A Pending JPS53120395A (en) 1977-03-30 1977-03-30 Production of avalanche photo diode

Country Status (1)

Country Link
JP (1) JPS53120395A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04109131U (en) * 1991-03-08 1992-09-21 株式会社イナツクス artificial marble
US9105788B2 (en) 2010-04-23 2015-08-11 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Silicon photoelectric multiplier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04109131U (en) * 1991-03-08 1992-09-21 株式会社イナツクス artificial marble
US9105788B2 (en) 2010-04-23 2015-08-11 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Silicon photoelectric multiplier

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