JPS53118366A - Isolating method of semiconductor pellet - Google Patents
Isolating method of semiconductor pelletInfo
- Publication number
- JPS53118366A JPS53118366A JP3372077A JP3372077A JPS53118366A JP S53118366 A JPS53118366 A JP S53118366A JP 3372077 A JP3372077 A JP 3372077A JP 3372077 A JP3372077 A JP 3372077A JP S53118366 A JPS53118366 A JP S53118366A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pellet
- isolating method
- pellet
- stretched
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3372077A JPS53118366A (en) | 1977-03-25 | 1977-03-25 | Isolating method of semiconductor pellet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3372077A JPS53118366A (en) | 1977-03-25 | 1977-03-25 | Isolating method of semiconductor pellet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53118366A true JPS53118366A (en) | 1978-10-16 |
Family
ID=12394228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3372077A Pending JPS53118366A (en) | 1977-03-25 | 1977-03-25 | Isolating method of semiconductor pellet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53118366A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007160280A (ja) * | 2005-12-16 | 2007-06-28 | National Agriculture & Food Research Organization | 水流分散器と自動洗浄機構とを備えた可動蓋式汚水散水器 |
JP2016040853A (ja) * | 2015-12-24 | 2016-03-24 | 三星ダイヤモンド工業株式会社 | ブレイク用治具 |
JP2017212451A (ja) * | 2017-06-30 | 2017-11-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
-
1977
- 1977-03-25 JP JP3372077A patent/JPS53118366A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007160280A (ja) * | 2005-12-16 | 2007-06-28 | National Agriculture & Food Research Organization | 水流分散器と自動洗浄機構とを備えた可動蓋式汚水散水器 |
JP2016040853A (ja) * | 2015-12-24 | 2016-03-24 | 三星ダイヤモンド工業株式会社 | ブレイク用治具 |
JP2017212451A (ja) * | 2017-06-30 | 2017-11-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
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